Granted Patent
Utility
US 6,576,559
· Confirmation No. 7254
SEMICONDUCTOR MANUFACTURING METHODS, PLASMA PROCESSING METHODS AND PLASMA PROCESSING APPARATUSES
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2002-03-12 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-03-12 | A.PE |
Preliminary Amendment | 10 | View | |
| 2002-03-12 | SPEC |
Specification | 66 | View | |
| 2002-03-12 | CLM |
Claims | 19 | View | |
| 2002-03-12 | ABST |
Abstract | 1 | View | |
| 2002-03-12 | DRW |
Drawings-only black and white line drawings | 17 | View | |
| 2002-03-12 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Toshihiko Nakata
Hiratsuka-shi, JAPAN
Takanori Ninomiya
Hiratsuka-shi, JAPAN
Sachio Uto
Yokohama-shi, JAPAN
Hiroyuki Nakano
Yokohama-shi, JAPAN
Attorneys & Agents of Record
Classification
USPC
438/706
G01N21/53
G01N21/94
G01N21/9501
H01J2237/0225
Prosecution
- Examiner
- DEO, DUY VU NGUYEN
- Art Unit
- 1765
- Customer No.
- 20457
- Docket No.
- 520.36971CX2
- Confirmation No.
- 7254
Foreign Priority
10-052088
·
1998-03-04
·
JAPAN
Publication
- Pub. No.
- US20020094685A1
- Pub. Date
- 2002-07-18
Patent Term Adjustment
-152days
CHANGE OF ADDRESS
Recorded 2017-11-29
from
HITACHI, LTD.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2011-03-25
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Quick Facts
- Patent No.
- US 6,576,559
- App. No.
- 10/095,066
- Filed
- 2002-03-12
- Granted
- 2003-06-10
- Pub. No.
- US20020094685A1
- Examiner
- DEO, DUY VU NGUYEN
- Art Unit
- 1765
- PTA
- -152 days
External Links