Manufacturing method of microstructure, manufacturing method and manufacturing device of electronic device
View Patent ↗Minute structures are obtained by exposing a process target material and changing the shape thereof by relatively shifting a laser beam or electron beam against the process target material and simultaneously repeating irradiation in an intermittent manner. A plurality of minute convex or concave shapes are formed on the process target material by employing a branching element for branching a single beam into a plurality of beams; a parallel element for converting said plurality of beams into beams which respectively advance in parallel; and a condensing element for condensing the plurality of beams to the process target material and generating a plurality of minute spots thereon.
1. A manufacturing method of a microstructure, comprising:
a spot set forming step for obtaining a spot set formed of a plurality of minute spots from a laser beam or an electron beam, said laser beam or said electron beam generated by a phase-type diffraction grating branching device including a plurality of types of phase shift areas having different phase shift quantities against said laser beam or said electron beam; and
an exposure step for forming an irradiation trace by irradiating said spot set a plurality of times while changing the irradiation position of said spot set against a process target material,
said exposure step performing multilayer exposure by overlapping a part of a plurality of irradiation traces pursuant to a single spot set and a part of a plurality of irradiation traces pursuant to another spot set.
2. A manufacturing method of a microstructure according to claim 1 , said spot set forming step including:
a branching step for branching a single beam into a plurality of beams; and
a condensing step for condensing said plurality of beams to said process target material.
3. A manufacturing method of a microstructure according to claim 1 , said spot set forming step including:
a branching step for branching a single beam into a plurality of beams;
a parallel step for making said plurality of beams mutually advance in parallel; and
a condensing step for condensing said plurality of beams to said process target material.
4. A manufacturing method of a microstructure according to claim 1 , said single spot set and said another spot set being spot sets adjacent in the shifting distance of said irradiation position.
5. A manufacturing method of a microstructure according to claim 1 , said single spot set and said another spot set being spot sets adjacent in the perpendicular direction against the shifting distance of said irradiation position.
6. A manufacturing method of a microstructure according to claim 1 , a spiral-shaped irradiation trace pursuant to a plurality of minute spots being formed by relatively shifting said spot set radially while rotating said process target material.
7. A manufacturing method of a micro structure according to claim 1 , said plurality of minute spots being formed by employing a phase-type diffraction grating having at least one of a striped pattern, quadrangular, equilateral triangular or hexagonal phase shift area.
8. A manufacturing method of a microstructure according to claim 1 , said process target material being a photosensitive material, and said irradiation trace being a latent image formed on said photosensitive material.
9. A manufacturing method of a microstructure according to claim 1 , said irradiation trace being a laser ablation.
10. The method of claim 1 , the beam being light beams, and the diffraction grating producing interference of the beams.