IP Library › Granted Patent US 6,707,176
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Granted Patent Utility
US 6,707,176 · Confirmation No. 5453

NON-LINEAR ACTUATOR SUSPENSION FOR MICROELECTROMECHANICAL SYSTEMS

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Quick Facts
Patent No.
US 6,707,176
App. No.
10/099,892
Filed
2002-03-14
Granted
2004-03-16
Art Unit
2834
PTA
-159 days