IP Library › Granted Patent US 6,805,810
Granted Patent Utility
US 6,805,810 · Confirmation No. 1525

METHOD & APPARATUS FOR MONITORING PLASMA PROCESSING OPERATIONS

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2004-03-29 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-03-29 CLM Claims 5 View
2004-03-29 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2004-03-29 XT/ Extension of Time 1 View
2003-10-24 CTNF Non-Final Rejection 5 View
2003-10-24 892 List of references cited by examiner 1 View
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2002-12-17 A.PE Preliminary Amendment 1 View
2002-12-17 SPEC Specification 1 View
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2002-10-11 A.PE Preliminary Amendment 1 View
2002-10-11 SPEC Specification 1 View
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2002-10-11 TRNA Transmittal of New Application 5 View
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2002-10-11 DRW Drawings-only black and white line drawings 63 View
2002-07-24 A.PE Preliminary Amendment 1 View
2002-07-24 SPEC Specification 1 View
2002-07-11 PEFN Pre-Exam Formalities Notice 2 View
2002-03-27 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-03-27 SRFW Search information including classification, databases and other search related notes 1 View
2002-03-27 FWCLM Index of Claims 1 View
2002-03-27 TRNA Transmittal of New Application 5 View
2002-03-27 DRW Drawings-only black and white line drawings 61 View
2002-03-27 SPEC Specification 253 View
2002-03-27 CLM Claims 17 View
2002-03-27 ABST Abstract 1 View
2002-03-27 OATH Oath or Declaration filed 3 View
2002-03-27 WFEE Fee Worksheet (SB06) 1 View
2002-03-27 WCLM Claims Worksheet (PTO-2022) 1 View
2002-03-27 A.PE Preliminary Amendment 1 View
2002-03-27 CLM Claims 1 View
2002-03-27 TRNA Transmittal of New Application 5 View
2002-03-27 A.PE Preliminary Amendment 2 View
2002-03-27 SPEC Specification 253 View
2002-03-27 CLM Claims 17 View
2002-03-27 ABST Abstract 1 View
2002-03-27 DRW Drawings-only black and white line drawings 61 View
2002-03-27 OATH Oath or Declaration filed 3 View
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Quick Facts
Patent No.
US 6,805,810
App. No.
10/108,193
Filed
2002-03-27
Granted
2004-10-19
Pub. No.
US20030019840A1
Art Unit
1765
PTA
-70 days