Liquid dispense manifold for chemical-mechanical polisher
View Patent ↗A liquid dispense manifold having drip nozzles configured to form controlled droplets is provided for use in chemical-mechanical polisher (CMP) systems. The liquid dispense manifold includes a plurality of drip nozzles that are secured to the side of the liquid dispense manifold. Each of the plurality of drip nozzles has a passage defined between a first end and a second end. A bend is defined within the drip nozzle passage such that droplets are directed downward toward a polishing surface. The nozzles are configured with respect to the manifold to provide an even flow rate of substantially uniform drops onto the polishing surface.
1. A fluid dispense manifold for use in a substrate processing system, comprising:
an elongated body having at least a length, a bottom region, and a side region;
a bore defined through the length of the elongated body, the bore having a first diameter;
a plurality of holes defined along the length of the elongated body through the side region to the bore, each of the plurality of holes having a second diameter that is less than the first diameter of the bore, a topmost surface of each of the plurality of holes being substantially tangent to a topmost surface of the bore such that a bottommost surface of each of the plurality of holes is positioned above a bottommost surface of the bore; and
a plurality of nozzles, each of the plurality of nozzles capable of being attached to each of the plurality of holes, each of the plurality of nozzles having a bend designed to direct a fluid flow capable of emanating from within the bore, out through the side region and toward the bottom region, the fluid flow capable of being directed onto a surface that is oriented beneath the bottom region, each of the plurality of nozzles being configured to direct the fluid flow downward in a form of substantially uniform drops.
2. A fluid dispense manifold as recited in claim 1 , wherein the surface that is oriented beneath the bottom region is substantially perpendicular to the side region.
3. A fluid dispense manifold as recited in claim 1 , wherein the bend is approximately 90 degrees.
4. A fluid dispense manifold as recited in claim 1 , wherein the bore defined through the length of the elongated body is configured to receive a supply line for delivering the fluid flow.
5. A fluid dispense manifold as recited in claim 1 , wherein the plurality of holes each define a path to the bore, and each hole is threaded.
6. A fluid dispense manifold as recited in claim 1 , wherein the fluid flow passage of each of the plurality of nozzles includes a first passage portion defined between the entry and the bend, the first passage portion being oriented to direct the fluid flow capable of emanating from within the bore in a horizontal direction.
7. A fluid dispense manifold as recited in claim 1 , wherein the surface is chemical mechanical polishing pad surface.
8. A fluid dispense manifold as recited in claim 1 , wherein the bend is configured to provide a conditioning path for the fluid flow.
9. A fluid dispense manifold as recited in claim 1 , wherein the fluid flow is a slurry fluid flow.
10. A fluid dispense manifold as recited in claim 1 , wherein the fluid dispense manifold is attached to bracket arms, the bracket arms positioning the fluid dispense manifold over a width of a linear polishing pad of a chemical mechanical planarization system.
11. A fluid dispense manifold as recited in claim 1 , wherein the elongated body has a second bore, a second set of holes, and a second set of nozzles.