IP Library › Granted Patent US 6,620,715
Granted Patent Utility
US 6,620,715 · Confirmation No. 3288

METHOD FOR FORMING SUB-CRITICAL DIMENSION STRUCTURES IN AN INTEGRATED CIRCUIT

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2010-12-17 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2010-12-17 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2010-12-08 C.AD Change of Address 2 View
2010-12-08 PA.. Power of Attorney 2 View
2010-12-08 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-12-08 R3.73 Assignee showing of ownership per 37 CFR 3.73 2 View
2003-07-21 IFEE Issue Fee Payment (PTO-85B) 1 View
2002-03-29 TRNA Transmittal of New Application 2 View
2002-03-29 SPEC Specification 29 View
2002-03-29 CLM Claims 5 View
2002-03-29 ABST Abstract 1 View
2002-03-29 DRW Drawings-only black and white line drawings 10 View
2002-03-29 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,620,715
App. No.
10/112,782
Filed
2002-03-29
Granted
2003-09-16
Art Unit
2812
PTA
0 days