Method of forming magnetic memory
View Patent ↗A method of forming a magnetic memory, includes, forming a first magnetic film over a substrate, forming a second magnetic film on the first magnetic film, forming a conductive film on second magnetic film, and forming a resist pattern on the conductive film. Then, a first pattern is formed by etching the conductive film using the resist pattern as a mask and the resist pattern is removed. Then, a first magnetic substance layer is formed by etching the second magnetic film using the first pattern as a mask.
1. A method of forming a magnetic memory, comprising:
forming a first magnetic film over a substrate;
forming an intermediate film on said first magnetic film;
forming a second magnetic film on said intermediate film;
forming a conductive film on said second magnetic film;
forming an insulating film on said conductive film;
forming a resist pattern on said insulating film;
forming a first pattern by etching said insulating film using said resist pattern as a mask;
removing said resist pattern;
forming a second pattern by etching said conductive film using said first pattern as a mask;
forming a first magnetic substance layer by etching said second magnetic film using said first and second patterns as a mask;
forming a mask pattern that covers the whole of an upper surface of said first magnetic substance layer; and
forming a second magnetic substance layer by etching said first magnetic film using said mask pattern as a mask.
2. The method as claimed in claim 1 , wherein each end of said second magnetic substance layer is formed so as to be separated from an end of said first magnetic substance layer in a direction parallel to a surface of said substrate.
3. The method as claimed in claim 2 , said method further comprising after forming said second magnetic substance layer:
forming an insulation layer covering said second magnetic substance layer;
forming a contact hole that passes through said first pattern and reaches said second pattern; and
forming a wiring layer in said contact hole to electrically connect to said second pattern.
4. A method of forming a magnetic memory, comprising:
forming a first magnetic film over a substrate;
forming an intermediate film on said first magnetic film;
forming a second magnetic film on said intermediate film;
forming a conductive film on second magnetic film;
forming a resist pattern on said conductive film;
forming a first pattern by etching said conductive film using said resist pattern as a mask;
removing said resist pattern;
forming a first magnetic substance layer by etching said second magnetic film using said first pattern as a mask;
forming a mask pattern that covers the whole of an upper surface of said first magnetic substance layer; and
forming a second magnetic substance layer by etching said first magnetic film using said mask pattern as a mask.
5. The method as claimed in claim 4 , wherein each end of said second magnetic substance layer is formed so as to be separated from an end of said first magnetic substance layer in a direction parallel to a surface of said substrate.
6. The method as claimed in claim 5 , said method further comprising after forming said second magnetic substance layer:
forming an insulation layer covering said second magnetic substance layer;
forming a contact hole that passes through said first pattern and reaches said second pattern; and
forming a wiring layer in said contact hole to electrically connected to said second pattern.