Monolithic ceramic substrate and method for making the same
View Patent ↗A monolithic ceramic substrate includes a green laminate having a plurality of green functional ceramic layers including a functional ceramic material, green support layers including a ceramic material that does not sinter at a sintering temperature for the green functional ceramic material to prevent shrinkage of the functional ceramic layers, first conductor patterns including a thin-film conductor, and second conductor patterns including a thick-film conductor. The green laminate is fired at the sintering temperature for the green functional ceramic material.
1. A monolithic ceramic substrate comprising:
at least three functional ceramic layers including a functional ceramic material;
at plurality of support layers including a ceramic material that does not sinter at a sintering temperature for the functional ceramic material, respective ones of the plurality of support layers being disposed on both sides of each of the at least three functional ceramic layers to prevent shrinkage of the at least three functional ceramic layers;
a first conductor pattern including at least one thin-film conductor selected from the group consisting of a metal foil, a metal wire, and a conductive thin-film, the first conductor pattern being in contact with at least one of the at least three functional ceramic layers; and
a second conductor pattern including a thick-film conductor in contact with at least one of the at least three functional ceramic layers.
2. The monolithic ceramic substrate according to claim 1 wherein at least one of the plurality of support layers is disposed between an adjacent pair of the at least three functional ceramic layers.
3. The monolithic ceramic substrate according to claim 2 , wherein the first conductor pattern and the second conductor pattern are each disposed between one of the at least three functional ceramic layers and one of the plurality of support layers.
4. The monolithic ceramic substrate according to claim 1 , wherein the thin-film conductor of the first conductor pattern has a thickness of about 100 μm or less.
5. The monolithic ceramic substrate according to claim 1 , wherein the thin-film conductor of the first conductor pattern has a porosity of about 10% or less before sintering of the at least three functional ceramic layers.
6. The monolithic ceramic substrate according to claim 1 , wherein the thin-film conductor of the first conductor pattern has a volume resistivity of about 2.5 Ω·cm or less and a surface roughness of about 5 μm or less.
7. The monolithic ceramic substrate according to claim 1 wherein an area ratio of the thin-film conductor of the first conductor pattern relative to the at least three functional ceramic layers is about 90% or less.
8. The monolithic ceramic substrate according to claim 1 , wherein the second conductor pattern is made of a conductive paste and has a thickness of about 30 μm or less after sintering of the at least three functional ceramic layers.
9. The monolithic ceramic substrate according to claim 1 , wherein the first conductor pattern defines at least one of an inductor electrode and a signal line.
10. The monolithic ceramic substrate according to claim 9 , wherein the area ratio of the thin-film conductor relative to the at least three functional ceramic layers is about 30% or less.
11. The monolithic ceramic substrate according to claim 1 , wherein the second conductor pattern defines a ground electrode.
12. The monolithic ceramic substrate according to claim 11 , wherein the area of the second conductor pattern is at least about 50% of the area of the at least three functional ceramic layers.