Granted Patent
Utility
US 6,685,543
· Confirmation No. 3153
COMPENSATING CHEMICAL MECHANICAL WAFER POLISHING APPARATUS AND METHOD
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-12-09 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2003-12-09 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2002-04-08 | TRNA |
Transmittal of New Application | 3 | View | |
| 2002-04-08 | A.PE |
Preliminary Amendment | 2 | View | |
| 2002-04-08 | SPEC |
Specification | 12 | View | |
| 2002-04-08 | CLM |
Claims | 4 | View | |
| 2002-04-08 | ABST |
Abstract | 1 | View | |
| 2002-04-08 | DRW |
Drawings-only black and white line drawings | 10 | View | |
| 2002-04-08 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Jer-Shyong Lai
Taipei, TAIWAN
Wen-Chueh Pan
Taipei, TAIWAN
Yang-Jiann Fann
Taoyuan, TAIWAN
Yih-Hsing Wang
Taipei, TAIWAN
Chien-Cheng He
Taoyuan, TAIWAN
Chaug-Liang Hsu
Taipei, TAIWAN
Attorneys & Agents of Record
Classification
USPC
451/1
B24B37/107
H10P52/402
B24B37/013
B24B53/017
B24B57/02
Prosecution
- Examiner
- RACHUBA, MAURINA T
- Art Unit
- 3723
- Customer No.
- 1444
- Docket No.
- LAI=46
- Confirmation No.
- 3153
Foreign Priority
90129167
·
2001-11-26
·
TAIWAN
Publication
- Pub. No.
- US20030100196A1
- Pub. Date
- 2003-05-29
Patent Term Adjustment
0days
No related applications found.
CHANGE OF NAME
Recorded 2015-04-17
from
FANN, YANG-JIANN,
HE, CHIEN-CHENG,
HSU, CHAUG-LIANG,
LAI, JER-SHYONG,
PAN, WEN-CHUEH,
WANG, YIH-HSING
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-06-05
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Quick Facts
- Patent No.
- US 6,685,543
- App. No.
- 10/117,088
- Filed
- 2002-04-08
- Granted
- 2004-02-03
- Pub. No.
- US20030100196A1
- Examiner
- RACHUBA, MAURINA T
- Art Unit
- 3723
- PTA
- 0 days
External Links