Patent Application
Utility
App. No. 10/117,199
· Confirmation No. 3341
METHOD OF FORMING A THIN FILM
Inventor:
Shinichi Kodama
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-09-30 | IFEE |
Issue Fee Payment (PTO-85B) | 2 | View | |
| 2002-04-08 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-04-08 | ADS |
Application Data Sheet | 3 | View | |
| 2002-04-08 | SPEC |
Specification | 11 | View | |
| 2002-04-08 | CLM |
Claims | 6 | View | |
| 2002-04-08 | ABST |
Abstract | 1 | View | |
| 2002-04-08 | DRW |
Drawings-only black and white line drawings | 1 | View | |
| 2002-04-08 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Shinichi Kodama
Kagoshima, JAPAN
Attorneys & Agents of Record
Classification
USPC
427/248.1
C23C16/4404
H01J37/32559
C23C16/4405
C23C16/509
Prosecution
- Examiner
- CHEN, BRET P
- Art Unit
- 1762
- Customer No.
- 466
- Docket No.
- 8013-1010
- Confirmation No.
- 3341
Foreign Priority
2001-118080
·
2001-04-17
·
JAPAN
Publication
- Pub. No.
- US20020150695A1
- Pub. Date
- 2002-10-17
Patent Term Adjustment
0days
No related applications found.
from
NEC CORPORATION
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-05-13
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Quick Facts
- App. No.
- 10/117,199
- Filed
- 2002-04-08
- Granted
- 2003-12-16
- Pub. No.
- US20020150695A1
- Examiner
- CHEN, BRET P
- Art Unit
- 1762
- PTA
- 0 days
External Links