IP Library Granted Patent US 6,962,677
Granted Patent B2
US 6,962,677 · App. 10/126,411 · Granted Nov 8, 2005

Method and apparatus for combustion harmfulness-elimination of PFC gas

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Quick Facts
Patent No.
US 6,962,677
App. No.
10/126,411
Granted
Nov 8, 2005
Kind
B2
Abstract

An apparatus for combustion harmfulness-elimination of PFC gas is provided, which prevents or effectively suppress the generation of byproducts and the corrosion of the inner walls of the apparatus. This apparatus comprises (a) a combustion furnace; (b) a gas introduction section formed near the combustion furnace; (c) a wet scrubber for wet-scrubbing a first gas; and (d) a connection pipe for connecting the gas introduction section to the scrubber; the connection pipe having a branch extending downward. Even if moisture is absorbed into the first gas during the wet-scrubbing process in the wet scrubber, the moisture in the first gas is automatically separated therefrom in a liquid state and flows out of the apparatus through the branch prior to reaching the gas introduction section.

Claims (19)

1. An apparatus for combustion toxicity-elimination of PFC gas, comprising:

(a) a combustion furnace;

(b) a gas introduction section formed near the combustion furnace;

(c) a wet scrubber for wet-scrubbing a first gas; and

(d) a connection pine for connecting the gas introduction section to the scrubber, the connection pine having a branch extending downward, wherein the connection pipe has a protrusion in its inside; and wherein the protrusion is located at a branching portion of the connection pipe from which the branch is extended; and wherein the protrusion is formed in such a way as to intersect with a flowing direction of the first gas.

2. The apparatus according to claim 1 , wherein inner walls of the gas introduction section are coated by fluororesin.

3. The apparatus according to claim 1 , wherein an introduction pipe is additionally provided in such a way as to be connected to the connection pipe at a location between the branch and the gas introduction section.

4. The apparatus according to claim 1 , wherein the branch of the connection pipe is connected to the combustion furnace.

5. The apparatus according to claim 3 , wherein said introduction pipe introduces a second gas into said gas introduction section.

6. The apparatus according to claim 1 , further comprising:

a combustion control section connected between said gas introduction section and said combustion furnace.

7. The apparatus according to claim 6 , further comprising:

a combustion gas introduction section that introduces a combustion gas into said combustion control section.

8. An apparatus for combustion toxicity-elimination of PFC gas, comprising:

(a) a combustion furnace;

(b) a gas introduction section formed near the combustion furnace;

(c) a wet scrubber for wet-scrubbing a first gas;

(d) a connection pipe for connecting the gas introduction section to the scrubber, the connection pipe having a branch extending downward and connected to the combustion furnace; and

(e) a moisture keeper device provided at an end of the branch in the furnace.

Assignments (1)
CHANGE OF NAME Recorded Nov 8, 2011
From: NEC LCD TECHNOLOGIES, LTD.
To: NLT TECHNOLOGIES, LTD.
Reel/Frame 027188/0890 →