Semiconductor integrated circuit device and manufacturing method of semiconductor integrated circuit device
View Patent ↗A semiconductor device comprises a semiconductor substrate; a first insulating film overlying a surface of the semiconductor substrate, an upper surface of the first insulating film being nitrided; a first copper-embedded interconnection embedded in the first insulating film, and which first copper-embedded interconnection contains copper as a main component; a copper nitride film overlying an upper surface of the first copper-embedded interconnection; a cap insulating film overlying an upper surface of the first insulating film and an upper surface of the copper nitride film; and a second insulting film overlying the cap insulating film.
1. A manufacturing method of a semiconductor integrated circuit device, comprising the steps of:
(a) forming a first interconnection groove in a first interlayer insulating film over a first main surface of a wafer;
(b) forming a first barrier metal film over the first interlayer insulating film both outside and inside the first interconnection groove;
(c) forming a first interconnection metal film containing copper as a main component over the first barrier metal film both outside and inside the first interconnection groove so as to fill the first interconnection groove;
(d) removing the first interconnection metal film outside the first interconnection groove by first chemical mechanical polishing using a first polishing slurry;
(e) after step (d), removing the first barrier metal film outside the first interconnection groove by second chemical mechanical polishing using a second polishing slurry different from the first polishing slurry in composition;
(f) after step (e), performing ammonia plasma treatment to upper surfaces of both the first interlayer insulating film and the first interconnection metal film; and
(g) after step (f), forming a copper diffusion barrier insulating film on the treated upper surfaces by plasma CVD.
2. The method according to claim 1 , wherein the first chemical mechanical polishing is performed using a first polishing pad, and the second chemical mechanical polishing is performed using a second polishing pad different from said first polishing pad.
3. The method according to claim 2 , wherein the copper diffusion barrier insulating film is a silicon nitride film.