Wiring layout method of integrated circuit
View Patent ↗A wiring layout method of an integrated circuit is disclosed. Checking of wiring area ratio is performed after an automatic wiring process. For a wiring other than a grid-shaped wiring, the line width W is classified into three steps of line-width range, and a minimum space width Smin between lines in each step of line-width range is defined in advance to satisfy a condition that Wmax/(Wmax+Smin)≦Pmax for a maximum line width Wmax in each step of line-width range. For grid-shaped wirings, a line width W is classified into two steps of line-width range. Further, in its upper step of line-width range, an allowable minimum area Amin (Amin≧Amin0) of a metal-removed area A is defined in advance to satisfy a condition that the wiring area ratio P is less than the allowable maximum value Pmax for a maximum line width Wmax. On the other hand, in its lower step of line-width range, made is a definition that the wiring area ratio P is same as the allowable maximum value Pmax for a maximum line width Wmax. Layout of wirings whose space width or metal-removed area has been checked not to satisfy the definitions is corrected in order to satisfy them.
1. A wiring layout method of an integrated circuit which lays out a wiring so that a wiring area ratio P of a wiring layer is less than an allowable maximum value Pmax, the method comprising the steps of:
(a) classifying a line width W into steps of line-width range, and defining in advance a minimum space width Smin between lines in each step of line-width range so as to satisfy a condition that Wmax/(Wmax+Smin)≦Pmax for a maximum line width Wmax in each step of line-width range; and
(b) laying out the wirings so as to comply with the definition of the minimum space width Smin according to the line width W.
2. The method according to claim 1 , wherein the minimum space width Smin in step (a) is defined so that the value of Wmax/(Wmax+Smin) is substantially the same as that of Pmax.
3. The wiring layout method of an integrated circuit which, in case of laying out a grid-shaped wiring, lays out a wiring so that a wiring area ratio P of a wiring layer is less than an allowable maximum value Pmax, and a metal-removed area A of a metal-removed portion is also more than a first allowable minimum area Amin0, the method comprising the steps of:
(a) classifying line width W into steps of line-width range, and defining in advance a second allowable minimum area Amin (Amin≧Amin0) of the metal-removed area A so as to satisfy a condition that the wiring area ratio P is less than the allowable maximum value Pmax for a maximum line width Wmax in each step of line-width range; and
(b) laying out the wirings so as to comply with the definition according to the line width W of the grid-shaped wiring.
4. The method according to claim 3 , wherein the second allowable minimum area Amin in the step (a) is defined so that the wiring area ratio P is substantially the same as that of Pmax for a maximum line width Wmax in each step of line-width range in case where the metal-removed portion is in a shape enabling the wiring area ratio P to become maximum.
5. The method according to claim 4 , wherein the steps of line-width range in the step (a) include two steps of W1min≦W≦W1max and W≦W1min.
6. The method according to one of claims 3 through 5 , wherein in step (a), the metal-removed area A in a minimum step of line-width range is defined to be the same as the first allowable minimum area Amin0.
7. A wiring layout method of an integrated circuit which, in case of laying out a grid-shaped wiring, lays out a wiring so that a wiring area ratio P of a wiring layer is less than an allowable maximum value Pmax, and so that a metal-removed area A of a metal-removed portion is also more than a first allowable minimum area Amin0, the method comprising the steps of:
(a1) classifying its line width W into steps of line-width range for a line & space, and defining in advance a minimum space width space between lines in each steps of line-width range so as to satisfy a condition that Wmax/(Wmax+Smin)≦Pmax for a maximum line width Wmax in each step of line-width range;
(a2) classifying its line width W into steps of line-width range for the grid-shaped wiring, and defining in advance a second allowable minimum area Amin (Amin≧Amin0) of the metal-removed area A so as to satisfy a condition that the wiring area ratio P is less than the allowable maximum value Pmax or a maximum line width Wmax in each step of line-width range; and
(b) laying out the wirings so as to comply with the definitions according to the line widths W.
8. The method according to claim 7 , wherein the minimum space width Smin in step (a1) is defined so that the value of Wmax/ (Wmax+Smin) is substantially the same as that of Pmax.
9. The method according to claim 8 , wherein the second allowable minimum area Amin in the step (a2) is defined so that the wiring area ratio P is less than and also substantially the same as that of Pmax for a maximum line width Wmax in each step of line-width range in case where the metal-removed portion is in a shape enabling the wiring area ratio P to become maximum.
10. The method according to claim 9 , wherein in step (a2) the metal-removed area A in a minimum step of line-width range is defined to be the same as the first allowable minimum area Amin0.