Array panel for liquid crystal display device and method of manufacturing the same
View Patent ↗An array panel for a liquid crystal display device includes a substrate, a gate line and a gate electrode on the substrate, wherein the gate line is connected to the gate electrode, a gate insulating layer on the gate line and the gate electrode, an active layer on the gate insulating layer, an ohmic contact layer on the active layer, a data line, a source electrode, and a drain electrode on the ohmic contact layer, wherein the data line, the source electrode, and the drain electrode are formed of molybdenum, a passivation layer on the data line, the source and drain electrodes, and a pixel electrode on the passivation layer, wherein the ohmic contact layer has the same shape as the data line, the source, and drain electrodes, and the active layer has the same shape as the data line, and the source electrode, and the drain electrode except for a channel area between the source electrode and the drain electrode, and the channel area has a “U” shape.
1. A method of manufacturing an array panel for a liquid crystal display device, comprising:
forming a gate line and a gate electrode on a substrate using a first mask;
forming a gate insulating layer, an amorphous silicon layer, a doped amorphous silicon layer, and a metal layer on the substrate in this order;
forming an active layer, an ohmic contact layer, a data line, a source electrode, and a drain electrode using a second mask;
forming a passivation layer using a third mask; and
forming a pixel electrode on the passivation layer using a fourth mask,
wherein a channel area between the source electrode and the drain electrode has a “U” shape defining two bending portions, and wherein the second mask includes a plurality of blocking patterns and a fine pattern, the blocking patterns corresponding to the data line, the source electrode, and the drain electrode, and the fine pattern corresponding to the channel area, and the blocking patterns and the fine pattern forming first and second slits such that the slit neighboring the drain electrode has widths at the two bending portions narrower than widths at portions between the two bending portions of the first and second slits.
2. The method according to claim 1 , the forming the active layer, the ohmic contact layer, the data line, the source electrode, and the drain electrode includes forming a photo-resist patterns having a first pattern corresponding to the data line, the source electrode, and the drain electrode, and a second pattern corresponding to the channel area.
3. The method according to claim 2 , wherein the first pattern has a thickness greater than the second pattern.
4. The method according to claim 1 , wherein the fine pattern has a width of 1.5 μm.
5. The method according to claim 1 , wherein the first and second slits have a width in a range of 1.1 μm to 1.3 μm.
6. The method according to claim 1 , wherein the slit neighboring the drain electrode has a corner width of 1.1 μm.
7. The method according to claim 1 , wherein the “U” shape is substantially completely symmetrical.