IP Library › Granted Patent US 7,625,540
Granted Patent B2
US 7,625,540 · App. 10/148,756 · Granted Dec 1, 2009

Fluorine removal by ion exchange

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Quick Facts
Patent No.
US 7,625,540
App. No.
10/148,756
Granted
Dec 1, 2009
Kind
B2
Abstract

A method for removing fluorine gas from a selected environment comprises contacting the fluorine gas with water to generate a solution of hydrofluoric acid and contacting the solution of hydrofluoric acid with an ion exchange resin having an active state operative to exchange selected ions therein for fluoride ions in the solution. The apparatus ( 200 ) may include a dual resin setup ( 222, 223 ) such that one of the ion-exchange resin can be in the service cycle while the other of the ion-exchange resins undergoes the regeneration and rinse/refill cycles.

Claims (18)

1. A method for removing fluorine gas from a gas stream from a semiconductor manufacturing process, comprising:

providing a gas stream comprising fluorine gas;

providing an ion-exchange resin containing water;

contacting said gas stream comprising fluorine gas with the water in said ion-exchange resin, thereby generating hydrofluoric acid;

wherein fluoride ions in said hydrofluoric acid are exchanged for selected ions in said ion-exchange resin.

2. A method according to claim 1 wherein the ion-exchange resin is a weak-base anion exchange resin or a strong base anion exchange resin.

3. A method according to claim 2 wherein the ion-exchange resin is a crosslinked poly-4-vinylpyridine resin or derivative thereof.

4. A method according to claim 1 wherein the ion-exchange resin includes pyridine functional groups.

5. A method according to claim 4 wherein the ion-exchange resin is a crosslinked poly-4-vinylpyridine resin or derivative thereof.

6. A method according to claim 1 wherein the generated hydrofluoric acid contains OF 2 or H 2 O 2 .

7. A method according to claim 1 wherein contacting said gas stream comprising fluorine gas with the water in said ion-exchange resin is a continuous process.

8. A method according to claim 1 wherein the ion-exchange resin is doped with an electron donor catalyst.

9. A method according to claim 8 wherein the catalyst is palladium or titanium.

10. A method according to claim 1 further comprising regenerating the ion-exchange resin with a regenerant solution and rinsing the ion-exchange resin with a rinse solution.

11. A method according to claim 10 wherein the regenerant solution is ammonium hydroxide and the rinse solution is de-ionized water.

12. A method according to claim 1 further comprising cooling the hydrofluoric acid.

13. A method according to claim 12 wherein said ion-exchange resin and said hydrofluoric acid are contained in a vessel, and said hydrofluoric acid is cooled by contacting said vessel with a heat exchanger apparatus.

14. A method according to claim 1 wherein the hydrofluoric acid has a pH between 5 and 7.