Method of manufacturing a semiconductor device
View Patent ↗A heat treatment for diffusing impurity ions implanted into a silicon layer is performed at a heat treatment temperature which is less than an aggregation temperature of the silicon layer. A thermal aggregation of the silicon layer can be inhibited, thereby reducing a silicon deficiency of the silicon layer.
1. A method of manufacturing a semiconductor device comprising:
providing a substrate which includes an insulating layer having an upper surface and a silicon layer extending over the upper surface of the insulating layer;
forming a field insulating region in the silicon layer;
forming an impurity region, which is surrounded by the field insulating region, in the silicon layer;
forming a gate electrode over the silicon layer; and
heat treating the silicon layer at a heat treatment temperature which is less than an aggregation temperature of the silicon layer, wherein T=(10t+530) °C., where T is the aggregation temperature and t is a thickness of the silicon layer.
2. The method of manufacturing the semiconductor device according to claim 1 , wherein the heat treating of the silicon layer is performed in a non-oxidizing atmosphere.
3. The method of manufacturing the semiconductor device according to claim 2 , wherein the non-oxidizing atmosphere is a noble gas atmosphere.
4. The method of manufacturing the semiconductor device according to claim 2 , wherein the non-oxidizing atmosphere is a reducing gas atmosphere.
5. A method of manufacturing a semiconductor device comprising:
providing a substrate which includes an insulating layer having an upper surface and a silicon layer extending over the upper surface of the insulating layer;
forming a field insulating region in the silicon layer;
forming an impurity region in the silicon layer by implanting impurity ions, the impurity region being surrounded by the field insulating region;
forming a gate electrode over the silicon layer; and
activating the implanted impurity ions in the impurity region using a heat treatment temperature that is less than an aggregation temperature of the silicon layer; wherein the heat treatment temperature is selected as a function of a thickness of the silicon layer.
6. The method of manufacturing the semiconductor device according to claim 5 , wherein said activating is performed in a non-oxidizing atmosphere.
7. The method of manufacturing the semiconductor device according to claim 6 , wherein the non-oxidizing atmosphere is a noble gas atmosphere.
8. The method of manufacturing the semiconductor device according to claim 6 , wherein the non-oxidizing atmosphere is a reducing gas atmosphere.