IP Library › Patent Application 10169033
Patent Application Utility PCT National Stage
App. No. 10/169,033 · Confirmation No. 5918

THINNER FOR RINSING PHOTORESIST AND METHOD OF TREATING PHOTORESIST LAYER

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2006-12-07 R3.73 Assignee showing of ownership per 37 CFR 3.73 1 View
2006-12-07 PA.. Power of Attorney 1 View
2006-12-07 N417 Electronic Filing System Acknowledgment Receipt 2 View
2003-08-20 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-08-20 LET. Miscellaneous Incoming Letter 1 View
2002-06-25 TRNA Transmittal of New Application 2 View
2002-06-25 SPEC Specification 10 View
2002-06-25 CLM Claims 2 View
2002-06-25 ABST Abstract 1 View
2002-06-25 DRW Drawings-only black and white line drawings 1 View
2002-06-25 OATH Oath or Declaration filed 3 View
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Quick Facts
App. No.
10/169,033
Filed
2002-06-25
Effective Filing
2002-06-24
Granted
2003-11-11
Pub. No.
US20030091942A1
Art Unit
1752
PTA
0 days