Granted Patent
Utility
US 6,645,856
· Confirmation No. 9566
METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE USING A HALF-TONE PHASE-SHIFT MASK TO TRANSFER A PATTERN ONTO A SUBSTRATE
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-08-22 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2002-06-14 | TRNA |
Transmittal of New Application | 1 | View | |
| 2002-06-14 | SPEC |
Specification | 46 | View | |
| 2002-06-14 | CLM |
Claims | 6 | View | |
| 2002-06-14 | ABST |
Abstract | 1 | View | |
| 2002-06-14 | DRW |
Drawings-only black and white line drawings | 18 | View | |
| 2002-06-14 | OATH |
Oath or Declaration filed | 4 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
438/671
H10P76/00
G03F1/32
G03F1/56
Y10S438/946
Prosecution
- Examiner
- SMOOT, STEPHEN W
- Art Unit
- 2813
- Docket No.
- HITA.0213
- Confirmation No.
- 9566
Foreign Priority
2001-247868
·
2001-08-17
·
JAPAN
Publication
- Pub. No.
- US20030036293A1
- Pub. Date
- 2003-02-20
Patent Term Adjustment
0days
No related applications found.
CHANGE OF ADDRESS
Recorded 2017-11-29
from
HITACHI, LTD.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2006-11-28
from
HITACHI, LTD.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-10-01
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-06-14
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Quick Facts
- Patent No.
- US 6,645,856
- App. No.
- 10/170,647
- Filed
- 2002-06-14
- Granted
- 2003-11-11
- Pub. No.
- US20030036293A1
- Examiner
- SMOOT, STEPHEN W
- Art Unit
- 2813
- PTA
- 0 days
External Links