Patent Application
Utility
App. No. 10/173,159
· Confirmation No. 4438
METHOD OF FORMING A RUTHENIUM FILM BY CVD
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2002-06-18 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-06-18 | A.PE |
Preliminary Amendment | 2 | View | |
| 2002-06-18 | SPEC |
Specification | 27 | View | |
| 2002-06-18 | CLM |
Claims | 2 | View | |
| 2002-06-18 | ABST |
Abstract | 1 | View | |
| 2002-06-18 | DRW |
Drawings-only black and white line drawings | 19 | View | |
| 2002-06-18 | OATH |
Oath or Declaration filed | 4 | View |
Inventors
Satoshi Yamamoto
Ome, JAPAN
Shinpei Iijima
Akishima, JAPAN
Attorneys & Agents of Record
Classification
USPC
438/240
H10B12/033
H10W20/069
C23C16/40
H10B12/315
H10D1/716
H10D1/692
H10D1/042
H10D1/694
H10D1/682
H10P14/43
H10W20/081
H10P14/412
H10W20/076
H10W20/089
Prosecution
- Examiner
- MENZ, LAURA MARY
- Art Unit
- 2813
- Customer No.
- 20457
- Docket No.
- 843.40574VX1
- Confirmation No.
- 4438
Foreign Priority
2000-322117
·
2000-10-23
·
JAPAN
Publication
- Pub. No.
- US20020160566A1
- Pub. Date
- 2002-10-31
Patent Term Adjustment
0days
from
HITACHI, LTD.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2011-03-25
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Quick Facts
- App. No.
- 10/173,159
- Filed
- 2002-06-18
- Granted
- 2003-04-08
- Pub. No.
- US20020160566A1
- Examiner
- MENZ, LAURA MARY
- Art Unit
- 2813
- PTA
- 0 days
External Links