Array substrate for liquid crystal display device and manufacturing method of the same
View Patent ↗An array substrate for a transflective liquid crystal display device includes a substrate, a thin film transistor having a channel, a gate electrode, a source electrode, and a drain electrode on the substrate, a first passivation layer on the thin film transistor, wherein the first passivation layer has a first contact hole exposing the drain electrode, a reflector on the first passivation layer, wherein the reflector is over the thin film transistor and has an opening corresponding to the first contact hole, a second passivation layer on the reflector, wherein the second passivation layer has a second contact hole through the opening, and a transparent electrode on the second passivation layer, wherein the transparent electrode has a hole over the channel of the thin film transistor and contacts the drain electrode of the thin film transistor through the first and second contact holes.
1. An array substrate for a liquid crystal display device, comprising:
a substrate;
a thin film transistor on the substrate, the thin film transistor having a channel, a gate electrode, a source electrode, and a drain electrode;
a first passivation layer on the thin film transistor, the first passivation layer having a first contact hole exposing the drain electrode;
a reflector on the first passivation layer, the reflector over the thin film transistor and in a pixel region and having an opening corresponding to the first contact hole;
a second passivation layer on the reflector, the second passivation layer having a second contact hole through the opening; and
a transparent electrode on the second passivation layer, the transparent electrode overlapping a portion of the reflector, having a hole over the channel of the thin film transistor and contacting the drain electrode of the thin film transistor through the first and second contact holes.
2. The array substrate according to claim 1 , wherein the reflector and the first passivation layer have a first transmissive hole and a second transmissive hole in, respectively.
3. The array substrate according to claim 2 , further comprising a gate insulating layer on the substrate, the gate insulating layer covering the gate electrode.
4. The array substrate according to claim 2 , wherein the second passivation layer has a third transmissive hole corresponding to the first and second transmissive holes.
5. The array substrate according to claim 4 , wherein the transparent electrode contacts the substrate through the transmissive holes.
6. The array substrate according to claim 1 , wherein the reflector is electrically isolated from the transparent electrode.
7. The array substrate according to claim 1 , wherein the reflector includes one of aluminum and an alloy of aluminum and neodymium.
8. The array substrate according to claim 1 , wherein the first passivation layer includes one of benzocyclobutene (BCB) and acrylic resin.
9. The array substrate according to claim 1 , further comprising a gate line and a data line, the gate line and the data line crossing each other and being electrically connected to the gate electrode and the source electrode of the thin film transistor, respectively.
10. The array substrate according to claim 1 , wherein the second passivation layer is of an inorganic material.
11. A method of manufacturing an array substrate for a liquid crystal display device, comprising:
forming a gate line and a gate electrode on a substrate;
forming a gate insulator on the gate line and the gate electrode;
forming an active layer on the gate insulator;
forming an ohmic contact layer on the active layer;
forming a data line, a source electrode, and a drain electrode on the ohmic contact layer, the active layer between the source and drain electrodes being a channel of a thin film transistor;
forming a first passivation layer on the data line, the source electrode, and the drain electrode, the first passivation layer having a first contact hole exposing the drain electrode;
forming a reflector on the first passivation layer, the reflector covering the channel of the thin film transistor, extending into a pixel region, and having an opening corresponding to the first contact hole;
forming a second passivation layer on the reflector, the second passivation layer having a second contact hole through the opening; and
forming a transparent electrode on the second passivation layer, the transparent electrode overlapping a portion of the reflector, having a hole over the channel of the thin film transistor and contacting the drain electrode of the thin film transistor through the first and second contact holes.
12. The method according to claim 11 , wherein the reflector and the first passivation layer have a first transmissive hole and a second transmissive hole in, respectively.
13. The method according to claim 12 , wherein the second passivation layer has a third transmissive hole corresponding to the first and second transmissive holes.
14. The method according to claim 13 , wherein the transparent electrode contacts the substrate through the transmissive holes.
15. The method according to claim 11 , wherein the reflector is electrically isolated from the transparent electrode.
16. The method according to claim 11 , wherein the reflector includes one of aluminum and an alloy of aluminum and neodymium.
17. The method according to claim 11 , wherein the first passivation layer includes one of benzocyclobutene (BCB) and acrylic resin.