IP Library › Granted Patent US 6,641,273
Granted Patent Utility Small
US 6,641,273 · Confirmation No. 6976

MEMS STRUCTURE WITH MECHANICAL OVERDEFLECTION LIMITER

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 Code Description Pages PDF
2003-07-29 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-07-29 LET. Miscellaneous Incoming Letter 1 View
2003-07-09 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-07-09 CLM Claims 3 View
2003-07-09 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2003-07-09 LET. Miscellaneous Incoming Letter 2 View
2002-06-28 TRNA Transmittal of New Application 4 View
2002-06-28 ADS Application Data Sheet 4 View
2002-06-28 SPEC Specification 5 View
2002-06-28 CLM Claims 3 View
2002-06-28 ABST Abstract 1 View
2002-06-28 DRW Drawings-only black and white line drawings 6 View
2002-06-28 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,641,273
App. No.
10/186,566
Filed
2002-06-28
Granted
2003-11-04
Art Unit
2872
PTA
-48 days