300 mm platen and belt configuration
View Patent ↗An invention is provided for a chemical mechanical planarization apparatus for processing 300 millimeter wafers. The CMP apparatus includes a polishing belt having a belt tension in a range of about 3000 lbs to 4000 lbs. In addition, a platen is disposed below the polishing belt at a positive platen height. The platen includes at least three air pressure zones, with each air pressure zone being capable of providing air pressure to a backside of the polishing belt. The platen can include, for example, eight air pressure zones. In this aspect, a second air pressure zone adjacent to a first outermost air pressure zone provides an air pressure in a range of about 30 psi to 50 psi, such as about 34 psi. In addition, a third air pressure zone a fourth pressure zone can each provide an air pressure in a range of about 4 psi to 13 psi, such as about 7 psi. In this aspect, the remaining air pressure zones can be set to 0 psi, which conserves fluid consumption. Additional fluid consumption reduction can be achieved using a plurality of check values disposed within an air supply system coupled to the platen, wherein the check values prevent negative airflow into the platen.
1. A chemical mechanical planarization (CMP) apparatus for processing wafers, comprising:
a polishing belt having a belt tension capable of reducing edge effect during wafer planarization;
a belt tension control device configured to manage the belt tension; and
a platen disposed below the polishing belt at a positive platen height, the platen having at least three air pressure zones, each air pressure zone capable of providing air pressure to a backside of the polishing belt, wherein a first outermost air pressure zone primarily provides an air bearing, and wherein a second and third air pressure zone primarily control tuning of the removal rate profile.
2. A CMP apparatus as recited in claim 1 , wherein the belt tension is in a range of about 3000 lbs to 4000 lbs.
3. A CMP apparatus as recited in claim 1 , wherein the platen is positioned at a platen height in a range of about 25 mil-65 mil.
4. A CMP apparatus as recited in claim 3 , wherein the platen height is about 48 mil.
5. A CMP apparatus as recited in claim 1 , wherein the platen includes eight air pressure zones.
6. A CMP apparatus as recited in claim 5 , wherein a second air pressure zone adjacent to a first outermost air pressure zone provides an air pressure in a range of about 30 psi to 50 psi.
7. A CMP apparatus as recited in claim 6 , wherein the second air pressure zone provides an air pressure of 34 psi.
8. A CMP apparatus as recited in claim 6 , wherein a third air pressure zone adjacent to the second air pressure zone and a fourth pressure zone adjacent to the third air pressure zone each provide an air pressure in a range of about 4 psi to 13 psi.
9. A CMP apparatus as recited in claim 8 , wherein the third air pressure zone and the forth air pressure zone each provide an air pressure of 7 psi.
10. A CMP apparatus as recited in claim 8 , wherein the first air pressure zone, a fifth air pressure zone, a sixth air pressure zone, a seventh air pressure zone, and an eighth air pressure zone all provide an air pressure of 0 psi.
11. A CMP apparatus as recited in claim 10 , further comprising a plurality of check valves disposed within an air supply system coupled to the platen, wherein the check valves prevent negative airflow into the platen.
12. A chemical mechanical planarization (CMP) apparatus for processing 300 millimeter wafers, comprising:
a polishing belt having a belt tension in a range of about 3000 lbs to 4000 lbs; and
a platen disposed below the polishing belt at a positive platen height, the platen having three independently controlled air pressure zones, each air pressure zone capable of providing air pressure to a backside of the polishing belt, wherein a first outermost air pressure zone primarily provides an air bearing, and wherein a second and third air pressure zone primarily control tuning of a removal rate profile.
13. A CMP apparatus as recited in claim 12 , wherein the platen is positioned at a platen height in a range of about 25 mil-65 mil.
14. A CMP apparatus as recited in claim 13 , wherein the first air pressure zone provides an air pressure in a range of about 30 psi to 50 psi, and wherein the second air pressure zone and the third air pressure zone each provide an air pressure in a range of about 4 psi to 13 psi.
15. A CMP apparatus as recited in claim 14 , wherein the first air pressure zone provides an air pressure of 34 psi, and wherein the second air pressure zone and the third air pressure zone each provide an air pressure of 7 psi.