Patent Application
Utility
Small
App. No. 10/196,349
· Confirmation No. 2253
CONFOCAL 3D WAFER SURFACE INSPECTION SYSTEM
Abandoned -- Failure to Pay Issue Fee
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2002-07-16 | TRNA |
Transmittal of New Application | 1 | View | |
| 2002-07-16 | SPEC |
Specification | 20 | View | |
| 2002-07-16 | CLM |
Claims | 5 | View | |
| 2002-07-16 | ABST |
Abstract | 1 | View | |
| 2002-07-16 | DRW |
Drawings-only black and white line drawings | 1 | View | |
| 2002-07-16 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
257/48
G02B21/008
G01N21/9501
G02B13/22
G02B21/0024
G02B21/004
G02B21/16
Prosecution
- Examiner
- ABRAHAM, FETSUM
- Art Unit
- 2826
- Docket No.
- A126.105.101
- Confirmation No.
- 2253
Publication
- Pub. No.
- US20030030794A1
- Pub. Date
- 2003-02-13
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-10-21
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Quick Facts
- App. No.
- 10/196,349
- Filed
- 2002-07-16
- Pub. No.
- US20030030794A1
- Examiner
- ABRAHAM, FETSUM
- Art Unit
- 2826
External Links