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App. No. 10/197,814 · Confirmation No. 9772

MASK LITHOGRAPHY DATA GENERATION METHOD

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2004-03-30 IFEE Issue Fee Payment (PTO-85B) 1 View
2002-07-19 TRNA Transmittal of New Application 2 View
2002-07-19 ADS Application Data Sheet 3 View
2002-07-19 SPEC Specification 17 View
2002-07-19 CLM Claims 3 View
2002-07-19 ABST Abstract 1 View
2002-07-19 DRW Drawings-only black and white line drawings 9 View
2002-07-19 OATH Oath or Declaration filed 2 View
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Quick Facts
App. No.
10/197,814
Filed
2002-07-19
Granted
2004-05-11
Pub. No.
US20030022078A1
Art Unit
1756
PTA
0 days