Production of stable, non-thermal atmospheric pressure rf capacitive plasmas using gases other than helium or neon
View Patent ↗The present invention enables the production of stable, steady state, non-thermal atmospheric pressure rf capacitive α-mode plasmas using gases other than helium and neon. In particular, the current invention generates and maintains stable, steady-state, non-thermal atmospheric pressure rf α-mode plasmas using pure argon or argon with reactive gas mixtures, pure oxygen or air. By replacing rare and expensive helium with more readily available gases, this invention makes it more economical to use atmospheric pressure rf α-mode plasmas for various materials processing applications.
1. A method of producing an atmospheric pressure rf capacitive α-mode plasma between two electrodes having a gap greater than 0.1 cm using gases other than helium or neon comprising the steps of:
connecting a rf voltage between said two electrodes;
introducing a flow of helium or neon between said two electrodes;
increasing said rf voltage until said helium or neon breaks down;
introducing a flow of a gas other than helium or neon between said two electrodes;
stopping said flow of helium or neon;
wherein a sustained α-mode plasma exists between said two electrodes.
2. The method as described in claim 1 wherein said rf voltage has a frequency of 13.56 MHz.
3. The method as described in claim 1 wherein said gas other than helium or neon is argon.
4. The method as described in claim 1 wherein said gas other than helium or neon is argon and a mixture of reactive gases.
5. The method as described in claim 1 wherein said gas other than helium or neon is pure oxygen.
6. A method of producing an atmospheric pressure rf capacitive α-mode plasma between two electrodes having a gap and using gases other than helium or neon comprising the steps of:
making the spacing of said gap between said electrodes equal to or less than 0.08 cm;
connecting a rf voltage device source having a frequency greater than or equal to 13.56 MHz;
introducing a gas other than helium or neon between said two electrodes thereby initiating a plasma; and
increasing said spacing of said gap between said two electrodes to be equal to or greater than 0.1 cm to sustain said atmospheric pressure rf plasma capacitive α-mode plasma.
7. The method as described in claim 6 , wherein said gas other than helium or neon is argon.
8. The method as described in claim 6 wherein said gas other than helium or neon is argon and a mixture of reactive gases.
9. The method as described in claim 6 wherein said gas other than helium or neon is pure oxygen.