Single source sputtering of thioaluminate phosphor films
View Patent ↗A method of deposition of a phosphor in a single-source sputtering process, in which the phosphor is selected from the group consisting of ternary, quaternary or higher thioaluminate, thiogallate and thioindate phosphors, and composites thereof, synthesized with cations selected from Groups IIA and IIB of the Periodic Table of Elements. The phosphor is of a pre-determined composition of elements. The method comprising sputtering in a hydrogen sulphide atmosphere from a single source composition so as to deposit a composition on a substrate. The composition of the targets of the single source has a relative increase in concentration of elements of the phosphor that have a lower atomic weight compared to other elements in said phosphor. The relative increase is controlled such that deposition of the pre-determined composition is effected on the substrate. Preferred phosphors are barium thioaluminate (BaAl 2 S 4 :Eu), and barium magnesium thioaluminates.
1. A single source sputtering process for depositing a thin-film phosphor composition, said process comprising;
providing a doped target composition having a higher concentration of any contained element of any other contained element of lower atomic weight relative to higher atomic weight with respect to said deposited thin-film phosphor composition; and
sputtering said doped target composition in a sulfur containing atmosphere to effect deposition thereof on a substrate.
2. The process of claim 1 , wherein said doped target composition comprises, ternary, quaternary or higher thioaluminate, thiogallate and thioindates and composites thereof containing cations selected from Groups IIA an IIB of the Periodic Table of Elements.
3. The process of claim 2 , wherein said cations are selected from the group consisting of barium, calcium, strontium, magnesium, zinc and cadmium.
4. The process of claim 3 , wherein said doped target composition is doped with dopant selected from the group consisting of europium a cerium.
5. The process of claim 4 , wherein said doped target composition is selected from the group consisting of BaAl 2 S 4 :Eu and Ba a Mg 1-a Al 2 S 4 :Eu wherein 0<a<1.
6. The process of claim 5 , wherein said doped target composition has a mole ratio, relative to BaS, of Al 2 S 3 in the range of 1.5-2.0 and of MgS in the range of 0-2.5.
7. The process of claim 6 , wherein said doped target composition has a mole ratio, relative to BaS, in the range of 0.02-0.07.
8. The process of claim 2 , wherein said phosphor composition is further annealed at a temperature of about 650° C.-750° C. for about 10 minutes.
9. The process of claim 8 , wherein said deposited phosphor composition has a thickness of about 350 nm-650 nm.
10. The process of claim 9 , wherein said substrate is a thick film ceramic material.
11. The process of claim 10 , wherein said thick film ceramic material comprises a ceramic sheet having a electrically conductive film deposited thereon and a thick film layer deposited on said electrically conductive film.
12. The process of claim 11 , wherein said ceramic material is selected from the group consisting of a ceramic sheet and a metal ceramic composite.
13. The process of claim 12 , wherein said ceramic sheet is alumina.
14. The process of claim 13 , wherein said electrically conductive film is selected from the group consisting of gold and silver alloy.
15. The process of claim 14 , wherein said thick film layer comprises ferroelectric material.
16. The process of claim 15 , wherein said ferroelectric material is selected from the group consisting of lead magnesium niobate titanate, lead zirconate titanate, barium titanate and mixtures thereof.
17. The process of claim 16 , wherein said thick film ceramic material additionally comprises one or more thin film dielectric layers thereon.
18. The process of claim 17 , wherein said thin film dielectric layer comprises a material selected from the group consisting of alumina silicon oxynitride, yttria, hafnia zinc sulfide, barium tantalate, barium titanate, tantalum oxide, aluminum titanate and strontium titanate.
19. The process of claim 18 , wherein said process additionally comprises providing a thin film dielectric layer on top of the thin-film phosphor composition.
20. The process of claim 1 , wherein said sulfur containing atmosphere is H 2 S.
21. The process of claim 20 , wherein said sputtering is conducted at a rate of about 20-70 nm/minute.
22. The process of claim 21 , wherein said substrate is provided at a temperature of about 150° C.-350° C.
23. The process of claim 1 , wherein said deposited thin-film phosphor composition has a lower concentration of elements of lower atomic weight relative to higher atomic weight elements with respect to said doped target composition.