IP Library Granted Patent US 6,664,179
Granted Patent Utility
US 6,664,179 · Confirmation No. 7539

SEMICONDUCTOR DEVICE PRODUCTION METHOD AND SEMICONDUCTOR DEVICE PRODUCTION APPARATUS

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Code Description Pages PDF
2003-08-11 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-08-05 LET. Miscellaneous Incoming Letter 1 View
2003-08-05 DRW Drawings-only black and white line drawings 1 View
2002-08-20 TRNA Transmittal of New Application 3 View
2002-08-20 SPEC Specification 34 View
2002-08-20 CLM Claims 5 View
2002-08-20 ABST Abstract 1 View
2002-08-20 DRW Drawings-only black and white line drawings 12 View
2002-08-20 OATH Oath or Declaration filed 3 View
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Quick Facts
Patent No.
US 6,664,179
App. No.
10/223,456
Filed
2002-08-20
Granted
2003-12-16
Pub. No.
US20030136423A1
Art Unit
2812
PTA
-24 days