Assembling method for producing a magnetic sensor with high output accuracy
View Patent ↗The fixed layers of all magnetoresistive elements that are formed on the same substrate are magnetized in the same direction. Chips including magnetoresistive elements are cut out individually from the substrate. A magnetic sensor is assembled by combining cut-out chips together with consideration given to the magnetization directions of the fixed layers of the magnetoresistive elements in the chips. In this manner, the fixed layers of the magnetoresistive elements are magnetized by a sufficiently strong magnetic field for magnetization, whereby an output signal having a large absolute value is obtained from the magnetoresistive elements.
1. An assembling method of a magnetic sensor, characterized by comprising the steps of:
forming a plurality of magnetoresistive elements on the same substrate in such a manner that the magnetoresistive elements are arranged regularly;
forming a plurality of connection pads at regular positions on the same substrate in such a manner that the connection pads are connected to terminals of the magnetoresistive elements;
magnetizing, in the same magnetization direction, fixed layers of all the magnetoresistive elements that are formed on the same substrate;
cutting out a plurality of chips each having a set of magnetoresistive elements and connection pads from the substrate; and
combining a plurality of cut-out chips together with consideration given to the magnetization directions of the fixed layers of the magnetoresistive elements in the chips,
wherein chips are cut out in such a manner that each chip includes at least two magnetoresistive elements and two sets of connection pads,
wherein four chips are used in each of which at least two magnetoresistive elements are formed; and
wherein bridge circuits that produce a multiple-phase output signal are formed by combining the four chips together in such a manner that the magnetization directions of the fixed layers of the magnetoresistive elements belonging to chips adjacent to each other deviate from each other by 90° in order in the same rotational direction and connecting, in series, magnetoresistive elements whose fixed layers are magnetized in opposite directions.
2. The assembling method of a magnetic sensor according to claim 1 , characterized in that connection pads are formed at symmetrical positions with respect to two sides that form a corner of each chip.