Array substrate for a transflective liquid crystal display device and fabricating method thereof
View Patent ↗A fabricating method of an array substrate for a transflective liquid crystal display device includes: forming a gate electrode and a gate line on the substrate; depositing a first insulating layer on the gate electrode and the gate line; forming an active layer on the first insulating layer over the gate electrode; forming an ohmic contact layer on the active layer; forming source and drain electrodes on the ohmic contact layer, and a data line connected to the source electrode, the data line defining a pixel region with the gate line; depositing a second insulating layer on the source and drain electrodes, and the data line, the second insulating layer having an inorganic material; forming a reflective plate on the second insulating layer at the pixel region, the reflective plate having a transmissive hole; forming a third insulating layer on the reflective plate; and forming a pixel electrode on the third insulating layer at the pixel region, the pixel electrode being transparent and connected to the drain electrode.
1. A fabricating method of an array substrate for a transflective liquid crystal display device, comprising:
forming a gate electrode and a gate line on the substrate;
depositing a first insulating layer on the gate electrode and the gate line;
forming an active layer on the first insulating layer over the gate electrode;
forming an ohmic contact layer on the active layer;
forming source and drain electrodes on the ohmic contact layer, and a data line connected to the source electrode, the data line defining a pixel region with the gate line;
depositing a second insulating layer on the source and drain electrodes, and the data line, the second insulating layer having an inorganic material, wherein an align key is adequately detectable through the second insulating layer;
forming a reflective plate on the second insulating layer at the pixel region, the reflective plate having a transmissive hole;
forming a third insulating layer on the reflective plate;
forming a pixel electrode on the third insulating layer at the pixel region, the pixel electrode being transparent and connected to the drain electrode; and
etching the first and second insulating layers by using the reflective plate as an etching mask before depositing the third insulating layer.
2. The method according to claim 1 , wherein etching the first and second insulating layers are performed in a dry etching method.
3. The method according to claim 2 , wherein etching the first and second insulating layers are performed partially.
4. The method according to claim 2 , wherein etching the first and second insulating layers are performed fully.
5. The method according to claim 1 , further comprising etching the first, second and third insulating layers to have a groove corresponding to the transmissive hole in common.
6. The method according to claim 1 , wherein the second insulating layer has one of an inorganic insulating material group including silicon nitride and silicon oxide.
7. The method according to claim 1 , wherein the third insulating layer has one of an organic insulating material group including benzocyclobutene and acrylic resin.
8. The method according to claim 1 , wherein the align key is formed on the substrate.