Method of improving the properties of adhesion of a non-oxide ceramic substrate before gluing it

1. A method of improving the properties of adhesion of a non-oxide ceramic substrate before gluing part of a surface of the substrate, which substrate has disposed on another face thereof at least one power semiconductor component prior to performing the method, which method comprises the following steps:

irradiating the surface of said ceramic substrate to be glued using an excimer laser in order to modify the chemical bonds, and

applying a coupling agent to the irradiated surface leading to the formation of a chemical bond between the coupling agent and the oxidized surface resulting from the irradiation of the ceramic substrate.

2. The method claimed in claim 1 , wherein the energy density supplied by said excimer laser is from 0.5 to 2 J/cm 2 at a frequency from 1 to 100 Hz.

3. The method claimed in claim 1 , wherein said laser is a KrF excimer laser emitting at 248 nm.

4. The method claimed in claim 1 , wherein said laser is an ArF excimer laser emitting at 193 nm.

5. The method claimed in claim 1 , wherein said substrate is made of AlN, SiC or Si 3 N 4 .

6. The method claimed in claim 1 , wherein said coupling agent is an aqueous silane solution.

7. A method of assembly, comprising:

irradiating the surface to be glued of a non-oxide ceramic substrate using an excimer laser;

applying a coupling agent to the irradiated surface leading to the formation of a chemical bond between the coupling agent and the irradiated surface; and

gluing the ceramic substrate to a cooling liquid manifold by applying a modified epoxy resin to an interface of the coupling agent-covered surface of the ceramic substrate and the cooling manifold.

8. The method claimed in claim 7 , wherein said cooling liquid manifold is made of polyetherimide.

9. A method of improving the properties of adhesion of a non-oxide ceramic substrate before gluing said substrate, which method comprises the following steps:

irradiating the surface of said ceramic substrate to be glued using an excimer laser in order to modify the chemical bonds; and

applying a coupling agent to the irradiated surface leading to the formation of a chemical bond between the coupling agent and the oxidized surface resulting from the irradiation of the ceramic substrate;

wherein said coupling agent is an aqueous silane solution.

10. A method of improving the properties of adhesion of a non-oxide ceramic substrate before gluing said substrate, which method comprises the following steps:

irradiating the surface of said ceramic substrate to be glued using an excimer laser in order to modify the chemical bonds;

applying a coupling agent to the irradiated surface leading to the formation of a chemical bond between the coupling agent and the oxidized surface resulting from the irradiation of the ceramic substrate; and

applying a glue to part of the coupling agent-covered surface.