Method of transferring devices, method of arranging devices using the same, and method of manufacturing an image display system
View Patent ↗A first adhesive layer is provided on a base substrate, and multiple devices are arranged on the first adhesive layer. The first adhesive layer is irradiated with laser light from the back side of the base substrate, only at positions corresponding to the devices to be transferred, by use of a mask, whereby the adhesive force of the first adhesive layer is lowered only at these positions, and only these devices are made releasable from the base substrate. A transfer substrate provided with a second adhesive layer and the base substrate are so disposed that the devices and the second adhesive layer are opposite to each other and pressed against each other. When the transfer substrate is stripped from the base substrate, only the devices to be transferred are selectively transferred onto the transfer substrate.
1. A method of transferring a plurality of devices arranged on a first substrate onto a second substrate, comprising the steps of:
transferring the devices to a first temporary holding member so the devices are spaced wider apart compared with a spacing of the devices on the first substrate;
fixing the devices to the first temporary holding member with a resin;
dicing the resin to separate the fixed devices; and
transferring the devices from the first temporary holding member onto the second substrate while spacing the devices further apart from each other, wherein the step of transferring the devices from the first temporary holding member comprises the steps of:
making the devices to be transferred releasable from a second temporary holding member; and
transferring the releasable devices from the second temporary holding member onto the second substrate including an adhesive layer.
2. A method of transferring the devices as set forth in claim 1 , wherein at least one of the devices is a semiconductor device using a nitride semiconductor.
3. A method of transferring one or more devices as set forth in claim 1 , wherein at least one of the devices is a device selected from the group consisting of: a light-emitting device, a liquid crystal control device, a photo-electric conversion device, a piezoelectric device, a thin film transistor device, a thin film diode device, a resistance device, a switching device, a micro magnetic device, and a micro optical device.
4. A method of manufacturing an image display system having a plurality of light-emitting devices arranged in a matrix form, the method comprising the steps of:
transferring the light-emitting devices to a first temporary holding member so that the devices are spaced wider apart from each other compared with a spacing of the devices on a first substrate;
fixing the light-emitting devices on the first temporary holding member using a resin;
dicing the resin on a light-emitting device basis to separate the resin-fixed light-emitting devices from the first temporary holding member; and
transferring the light-emitting devices from the first temporary holding member onto a second substrate while spacing the light-emitting devices further apart from each other, wherein the step of transferring the light-emitting devices from the first temporary holding member comprises the steps of:
making the light-emitting devices to be transferred releasable from a second temporary holding member; and
transferring the releasable light-emitting devices from the second temporary holding member onto the second substrate including an adhesive layer.