IP Library › Patent Application 10238759
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App. No. 10/238,759 · Confirmation No. 8422

CHARGED PARTICLE BEAM EXPOSURE SYSTEM AND METHOD

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2009-03-02 IMIS Miscellaneous Internal Document 1 View
2003-08-13 IFEE Issue Fee Payment (PTO-85B) 1 View
2002-09-11 TRNA Transmittal of New Application 3 View
2002-09-11 A.PE Preliminary Amendment 10 View
2002-09-11 SPEC Specification 178 View
2002-09-11 CLM Claims 46 View
2002-09-11 ABST Abstract 1 View
2002-09-11 DRW Drawings-only black and white line drawings 109 View
2002-09-11 OATH Oath or Declaration filed 4 View
2002-09-11 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
App. No.
10/238,759
Filed
2002-09-11
Granted
2003-11-11
Pub. No.
US20030025088A1
Art Unit
1763
PTA
0 days