Diffraction grating with reduced polarization-dependent loss
View Patent ↗A diffraction grating that achieves high diffraction efficiency at all polarizations for optical signals at telecommunications wavelengths is provided. The diffraction grating has a substrate and a plurality of reflective faces oriented at respective blaze angles θ b spaced along the substrate surface, with the blaze angles substantially differ from the Lit trow condition. Each reflective surface is supported by a support wall connected substantially with the substrate surface.
1. A diffraction grating comprising:
a substrate having a plurality of grooves formed in the substrate to define a plurality of reflective faces, each such reflective face being supported by a support wall extending from a base within the substrate and being uniformly inclined with respect to a longitudinal direction,
wherein the base extends parallel to the longitudinal direction to define flat intermediate surface portions of the substrate substantially normal to the support wall and between the reflective faces; and
wherein each reflective face comprises a reflective metal coating.
2. The diffraction grating recited in claim 1 wherein each reflective face is inclined at a blaze angle between 50° and 70° with respect to the flat intermediate surface portions.
3. The diffraction grating recited in claim 1 wherein each reflective face is inclined at a blaze angle between 50° and 60° with respect to the flat intermediate surface portions.
4. The diffraction grating recited in claim 1 wherein the reflective faces are spaced along the substrate with a grating density 1/d between 700 and 1100 faces/mm.
5. The diffraction grating recited in claim 1 wherein the reflective faces are spaced along the substrate with a grating density 1/d between 800 and 1000 faces/mm.
6. The diffraction grating recited in claim 1 wherein the support wall has an altitude above the flat intermediate surface portions between 1200 and 1400 nm.
7. The diffracting grating recited in claim 1 wherein the reflective metal coating comprises gold.
8. A method for forming a diffraction grating, the method comprising:
forming a plurality of grooves in a substrate to define a plurality of reflective faces, each such reflective face being supported by a support wall extending from a base within the substrate and being uniformly inclined with respect to a longitudinal direction,
wherein the base extends parallel to the longitudinal direction to define flat intermediate surface portions of the substrate substantially normal to the support wall and between the reflective faces; and
wherein each reflective face comprises a reflective metal coating.
9. The method recited in claim 8 wherein each reflective face is inclined at a blaze angle between 50° and 70° with respect to the flat intermediate surface portions.
10. The method recited in claim 8 wherein each reflective face is inclined at a blaze angle between 50° and 60° with respect to the flat intermediate surface portions.
11. The method recited in claim 8 wherein the reflective faces are spaced along the substrate with a grating density 1/d between 700 and 1100 faces/mm.
12. The method recited in claim 8 wherein the reflective faces are spaced along the substrate with a grating density 1/d between 800 and 1000 faces/mm.
13. The method recited in claim 8 wherein the support wall has an altitude above the flat intermediate surface portions between 1200 and 1400 nm.
14. The method recited in claim 8 wherein the reflective metal coating comprises gold.