IP Library › Granted Patent US 7,115,969
Granted Patent B1
US 7,115,969 · App. 10/242,966 · Granted Oct 3, 2006

Fixed parallel plate MEMS capacitor microsensor and microsensor array and method of making same

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Quick Facts
Patent No.
US 7,115,969
App. No.
10/242,966
Filed
Sep 13, 2002
Granted
Oct 3, 2006
Kind
B1
Art Unit
2811
USPC
257/532
Abstract

A fixed parallel plate micro-mechanical systems (MEMS) based sensor is fabricated to allow a dissolved dielectric to flow through a porous top plate, coming to rest on a bottom plate. A post-deposition bake ensures further purity and uniformity of the dielectric layer. In one embodiment, the dielectric is a polymer. In one embodiment, a support layer is deposited onto the top plate for strengthening the sensor. In another embodiment, the bottom plate is dual-layered for a narrowed gap. Integrated circuit arrays of such sensors can be made, having multiple devices separated from each other by a physical barrier, such as a polycrystalline containment rim or trough, for preventing polymer material from one sensor from interfering with that of another.

Claims (11)

1. A fixed, parallel plate capacitive microsensor comprising:

a bottom plate electrode disposed on a substrate;

a porous top plate electrode disposed in fixed, spaced relation to the bottom plate electrode; and

a dielectric disposed between said bottom plate electrode and said top plate electrode and through said porous top plate electrode.

2. The microsensor of claim 1 , wherein said porous top plate electrode is fabricated with pores using standard photolithography.

3. The microsensor of claim 1 , further comprising one or more support layers deposited onto said porous top plate electrode.

4. The microsensor of claim 1 , wherein said bottom plate electrode is a drive electrode.

5. The microsensor of claim 1 , wherein said bottom plate electrode is a dual-layer electrode.

6. The microsensor of claim 1 , wherein said dielectric is selected from the group consisting of a polymer, a ceramic, and a solgel.

7. The microsensor of claim 1 , wherein said porous top plate electrode is made from a polycrystalline semiconductor material or a metal.

8. The microsensor of claim 1 , wherein said bottom plate electrode is made from a polycrystalline semiconductor material or a metal.

Assignments (10)
RELEASE OF SECURITY INTEREST Recorded Apr 6, 2022
From: WILMINGTON TRUST, NATIONAL ASSOCIATION, AS COLLATERAL AGENT
To: CHARLESTON MARINE CONTAINERS, INC.; DIGITAL FUSION, INC.; KRATOS INTEGRAL HOLDINGS, LLC; KRATOS TECHNOLOGY & TRAINING SOLUTIONS, INC.; KRATOS UNMANNED AERIAL SYSTEMS, INC. (F/K/A COMPOSITE ENGINEERING INC.); SAT CORPORATION
Reel/Frame 059616/0001 →
RELEASE OF SECURITY INTEREST Recorded Apr 6, 2022
From: TRUIST BANK, SUCCESSOR BY MERGER TO SUNTRUST BANK, AS COLLATERAL AGENT AND ADMINISTRATIVE AGENT
To: KRATOS INTEGRAL HOLDINGS, LLC; SAT CORPORATION; KRATOS TECHNOLOGY & TRAINING SOLUTIONS, INC.; CHARLESTON MARINE CONTAINERS, INC.; DIGITAL FUSION, INC.; KRATOS UNMANNED AERIAL SYSTEMS, INC. (F/K/A COMPOSITE ENGINEERING, INC.); GICHNER SYTEMS GROUP, INC.; MICRO SYSTEMS, INC.; SECUREINFO CORPORATION
Reel/Frame 059616/0151 →
SECURITY INTEREST Recorded Apr 6, 2022
From: FLORIDA TURBINE TECHNOLOGIES, INC.; GICHNER SYSTEMS GROUP, INC.; KRATOS ANTENNA SOLUTIONS CORPORATON; KRATOS INTEGRAL HOLDINGS, LLC; KRATOS TECHNOLOGY & TRAINING SOLUTIONS, INC.; KRATOS UNMANNED AERIAL SYSTEMS, INC.; MICRO SYSTEMS, INC.
To: TRUIST BANK, AS ADMINISTRATIVE AGENT
Reel/Frame 059664/0917 →
AMENDED AND RESTATED INTELLECTUAL PROPERTY SECURITY AGREEMENT Recorded Dec 7, 2017
From: KRATOS DEFENSE & SECURITY SOLUTIONS, INC.; AI METRIX, INC.; AIRORLITE COMMUNICATIONS, INC.; AVTEC SYSTEMS, INC.; BSC PARTNERS, LLC; CARLSBAD ISI, INC.; CHARLESTON MARINE CONTAINERS INC.; DALLASTOWN REALTY I, LLC; DALLASTOWN REALTY II, LLC; DEFENSE SYSTEMS, INCORPORATED; DEI SERVICES CORPORATION; DFI REALTY, LLC; DIGITAL FUSION SOLUTIONS, INC.; DIGITAL FUSION, INC.; DIVERSIFIED SECURITY SOLUTIONS, INC.; DTI ASSOCIATES, INC.; GENERAL MICROWAVE CORPORATION; GENERAL MICROWAVE ISRAEL CORPORATION; GICHNER SYSTEMS GROUP, INC.; GICHNER SYSTEMS INTRERNATIONAL, INC.; HAVERSTICK CONSULTING, INC.; HAVERSTICK GOVERNMENT SOLUTIONS, INC.; HENRY BROS. ELECTRONICS, INC.; HENRY BROS. ELECTRONICS INC.; HENRY BROS. ELECTRONICS, L.L.C.; HGS HOLDINGS, INC.; JMA ASSOCIATES, INC.; KPSS GOVERNMENT SOLUTIONS, INC; KRATOS COMMUNICATIONS, INC.; KRATOS DEFENSE & ROCKET SUPPORT SERVICES, INC.; KRATOS INTEGRAL HOLDINGS, LLC; KRATOS INTEGRAL SYSTEMS INTERNATIONAL, INC.; KRATOS PUBLIC SAFETY & SECURITY SOLUTIONS, INC.; KRATOS SOUTHEAST, INC.; KRATOS SPACE & MISSILE DEFENSE SYSTEMS, INC.; KRATOS SYSTEMS AND SOLUTIONS, INC.; KRATOS TECHNOLOGY & TRAINING SOLUTIONS, INC.; KRATOS TEXAS, INC.; KRATOS UNMANNED AERIAL SYSTEMS, INC.; KRATOS UNMANNED SYSTEMS SOLUTIONS, INC.; LVDM, INC.; MADISON RESEARCH CORPORATION; MICRO SYSTEMS, INC.; MSI ACQUISITION CORP.; POLEXIS, INC.; REAL TIME LOGIC, INC.; REALITY BASED IT SERVICES LTD.; ROCKET SUPPORT SERVICES, LLC; SAT CORPORATION; SCT ACQUISITION, LLC; SCT REAL ESTATE, LLC; SECUREINFO CORPORATION; SHADOW I, INC.; SHADOW II, INC.; SUMMIT RESEARCH CORPORATION; WFI NMC CORP.; KRATOS SOUTHWEST L.P.
To: SUNTRUST BANK
Reel/Frame 044742/0845 →
SECURITY INTEREST Recorded Dec 1, 2017
From: AIRORLITE COMMUNICATIONS, INC.; CHARLESTON MARINE CONTAINERS, INC.; DIGITAL FUSION, INC.; HENRY BROS. ELECTRONICS, INC. (DE); HENRY BROS. ELECTRONICS, INC. (NJ); KRATOS INTEGRAL HOLDINGS, LLC; KRATOS TECHNOLOGY & TRAINING SOLUTIONS, INC.; KRATOS UNMANNED AERIAL SYSTEMS, INC.; GICHNER SYSTEMS GROUP, INC.; MICRO SYSTEMS, INC.; SAT CORPORATION; SECUREINFO CORPORATION
To: WILMINGTON TRUST, NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 044593/0678 →
RELEASE OF SECURITY INTEREST Recorded Nov 21, 2017
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: AIRORLITE COMMUNICATIONS, INC.; CHARLESTON MARINE CONTAINERS INC.; KRATOS UNMANNED AERIAL SYSTEMS, INC.; DIGITAL FUSION, INC.; GENERAL MICROWAVE CORPORATION; HENRY BROS. ELECTRONICS, INC.; KRATOS INTEGRAL HOLDINGS, LLC; KRATOS TECHNOLOGY & TRAINING SOLUTIONS, INC.; KRATOS DEFENSE & SECURITY SOLUTIONS, INC.; SECUREINFO CORPORATION
Reel/Frame 044195/0924 →
SECURITY INTEREST Recorded Jan 30, 2015
From: AIRORLITE COMMUNICATIONS, INC.; CHARLESTON MARINE CONTAINERS INC.; COMPOSITE ENGINEERING, INC.; DIGITAL FUSION, INC.; GENERAL MICROWAVE CORPORATION; HENRY BROS. ELECTRONICS, INC.; KRATOS INTEGRAL HOLDINGS, LLC; KRATOS TECHNOLOGY & TRAINING SOLUTIONS, INC.; KRATOS DEFENSE & SECURITY SOLUTIONS, INC.; SECUREINFO CORPORATION
To: WILMINGTON TRUST, NATIONAL ASSOCIATION
Reel/Frame 034861/0796 →
RELEASE OF SECURITY INTEREST Recorded Jun 18, 2014
From: WILMINGTON TRUST, NATIONAL ASSOCIATION (AS SUCCESSOR BY MERGER TO WILMINGTON TRUST FSB)
To: KRATOS TECHNOLOGY & TRAINING SOLUTIONS, INC.
Reel/Frame 033200/0105 →
RELEASE OF SECURITY INTEREST Recorded Jun 17, 2014
From: KEYBANK NATIONAL ASSOCIATION
To: KRATOS TECHNOLOGY & TRAINING SOLUTIONS, INC.
Reel/Frame 033188/0765 →
CHANGE OF NAME Recorded Aug 23, 2012
From: SYS
To: KRATOS TECHNOLOGY & TRAINING SOLUTIONS, INC.
Reel/Frame 028840/0214 →