High rate deposition of titanium dioxide
View Patent ↗There is provided a structure. The structure comprises a substrate, and a titanium oxide layer disposed over the substrate. There is also provided a method of forming a titanium oxide coating on a substrate. The method includes generating a plasma; providing a first reactant, comprising titanium, and a second reactant, comprising oxygen, into the plasma stream extending to the substrate; and forming the titanium oxide coating on the substrate.
1. A structure comprising:
a substrate; and
a titanium oxide layer disposed over the substrate, wherein the titanium oxide layer is characterized by a property, wherein the property is at least one of an absorbency per unit thickness at an optical wavelength of 330 nm of greater than 4/μm, or an absorbency per unit thickness at an optical wavelength of 330 nm of greater than 4/μm which decreases by no more than 5% after the structure is submerged for 3 days in distilled water at 65° C.
2. The structure of claim 1 , further comprising:
an interlayer disposed between the substrate and the titanium oxide layer.
3. The structure of claim 1 , further comprising:
a stack of alternating interlayers and titanium oxide layers formed over the titanium oxide layer.
4. The structure of claim 1 , further comprising:
an abrasion resistant layer disposed on the titanium oxide layer.
5. The structure of claim 4 , wherein the abrasion resistant layer is one of SiO x , SiO x C y H z , silicon dioxide and aluminum oxide.
6. The structure of claim 1 , wherein the substrate comprises a polymer.
7. The structure of claim 6 , wherein the substrate comprises polycarbonate.
8. The structure of claim 1 , wherein the substrate comprises one of a lens, a vehicle window, a display screen and a component for a display screen.
9. The structure of claim 1 , wherein the titanium oxide layer is deposited using an expanding thermal plasma technique.
10. The structure of claim 1 , wherein the substrate is polycarbonate and the oxygen permeation rate through the polycarbonate film is less than 10 cc/m 2 /day in 100% O 2 at room temperature.
11. The structure of claim 1 , wherein the titanium oxide layer has an absorbency per unit thickness at an optical wavelength of 330 nm of greater than 4/μm.
12. The structure of claim 1 , wherein the titanium oxide layer has an absorbency per unit thickness at an optical wavelength of 330 nm of greater than 4/μm which decreases by no more than 5% after the structure is submerged for 3 days in distilled water at 65° C.
13. The structure of claim 1 , further comprising:
an interlayer disposed between the substrate and the titanium oxide layer; and
an abrasion layer disposed on the titanium oxide layer; and
wherein the structure exhibits no delamination after the structure is submerged for 3 days in distilled water at 65° C.
14. A method of forming the structure of claim 1 , the method comprising:
generating a plasma stream with an expanding thermal plasma generator providing a first reactant, comprising titanium, and a second reactant, comprising oxygen, into the plasma stream extending to the substrate; and
forming the titanium oxide layer.
15. The method of claim 14 , wherein the titanium oxide coating is formed on the substrate at a rate of greater than 1 μm/minute.
16. The method of claim 14 , wherein the first reactant comprises TiCl 4 and the second reactant comprises water vapor.
17. The method of claim 14 , wherein the plasma stream comprises an Ar plasma stream.
18. The method of claim 14 , wherein the deposition rate of the titanium oxide film is at least about 16 nm/second.
19. A titanium oxide coating made by the method of claim 14 .