Method for forming a reflection-type light diffuser
View Patent ↗A reflection-type light diffuser is fabricated on a glass substrate, which has a pixel matrix array disposed thereon. The pixel matrix array includes a plurality of adjacent pixel regions, and each of the pixel regions has a pair of side edges that are parallel and opposite. A photoresist pattern is formed on the glass substrate, and the photoresist pattern includes a plurality of wave-shaped straight protrusions formed on the side edges of each of the pixel regions and a plurality of bump structures formed on each of the pixel regions. A reflective metal layer is formed on the photoresist pattern.
1. A method for fabricating a reflection-type light diffuser, the reflection-type light diffuser being used for scattering incident light, the method comprising:
providing a substrate comprising a pixel matrix array disposed on the substrate, the pixel matrix array comprising a plurality of pixel regions, each of the pixel regions having a pair of side edges which are parallel and opposite;
forming a photoresist layer on the substrate;
performing an exposing and developing process by using a photo mask to form a photoresist pattern in the photoresist layer, the photoresist pattern comprising a plurality of straight protrusions positioned on the side edges of each of the pixel regions and a plurality of bump structures positioned on each of the pixel regions;
performing a baking process and a follow-up baking process on the photoresist pattern; and
forming a reflective metal layer on the photoresist pattern.
2. The method as claim 1 wherein the method further comprises a pre-baking process performed before the exposing and developing process, and the pre-baking process has a temperature of approximately 80 to 90° C.
3. The method as claim 1 wherein the baking process performed after the exposing and developing process, and the baking process has a temperature of approximately 130° C.
4. The method as claim 3 wherein the follow-up baking process performed after the baking process, and the follow-up baking process has a temperature of approximately 220° C.
5. The method as claim 1 wherein the photoresist layer has a thickness between 4.8 to 5.5 micrometers (μm).
6. The method as claim 1 wherein a pattern of the photo mask comprises a plurality of first light shielding regions corresponding to the straight protrusions of the photoresist pattern and a plurality of second light shielding regions corresponding to the bump structures of the photoresist pattern.
7. The method as claim 1 wherein the straight protrusions of the photoresist pattern has a pair of opposite side edges, and the side edges are wave-shaped.