Member for electronic circuit, method for manufacturing the member, and electronic part
A member for use in an electronic circuit has a thermally conductive layer mounted on a heat sink. The thermally conductive layer comprises an insulating substrate, a first joint member joining the insulating substrate to the heat sink and containing an active element, a second joint member disposed on the insulating substrate, and an electrode disposed on the second joint member. The insulating substrate comprises an AlN layer or an Si 3 N 4 layer. Each of the first and second joint members is made of a hard brazing material containing an active element. The heat sink is made of an SiC/Cu composite material or a C/Cu composite material.
1. A member for use in an electronic circuit characterized in that an intermediate layer is interposed between a layer functioning as an insulating substrate and a heat sink, and joint members each containing an active element are interposed respectively between said layer functioning as the insulating substrate and said intermediate layer and between said intermediate layer and said heat sink,
wherein one of said joint members directly contacts said heat sink, and the entireties of said heat sink and said one of said joint members directly contacting said heat sink are at least as wide as said insulating substrate.
2. A member for use in an electronic circuit according to claim 1 , characterized in that said layer functioning as the insulating substrate, said joint members, and said heat sink have a coefficient of thermal expansion ranging from 3.0×10 −6 to 1.0×10 −5 /K.
3. A member for use in an electronic circuit according to claim 1 , characterized in that said joint members are made of a hard brazing material containing an active element.
4. A member for use in an electronic circuit according to claim 1 , characterized in that said active element comprises at least one element belonging to the 2A group, 3A group, 4A group, 5A group, or 4B group in the periodic table.
5. A member for use in an electronic circuit according to claim 1 , characterized in that said heat sink is made of a material comprising at least one selected from the group consisting of SiC, AlN, Si 3 N 4 , BeO, Al 2 O 3 , Be 2 C, C, Cu, Cu alloy, Al, Al alloy, Ag, Ag alloy, and Si.
6. A member for use in an electronic circuit according to claim 5 , characterized in that said heat sink is made of a composite material having an SiC matrix infiltrated with Cu or Cu alloy.
7. A member for use in an electronic circuit according to claim 5 , characterized in that said heat sink is made of a composite material having a C matrix infiltrated with Cu or Cu alloy.
8. A member for use in an electronic circuit according to claim 1 , characterized in that said layer functioning as the insulating substrate comprises an AlN layer or an Si 3 N 4 layer.
9. A member for use in an electronic circuit according to claim 1 , characterized in that said heat sink has an outwardly convex surface on which cooling fins are mounted.
10. A member for use in an electronic circuit according to claim 9 , characterized in that said outwardly convex surface of said heat sink projects by a dimension which is in a range from {fraction (1/200)} to {fraction (1/20000)} of the maximum length of said heat sink.
11. A method of manufacturing a member for use in an electronic circuit, characterized by the steps of interposing an intermediate layer between a heat sink and a layer functioning as an insulating substrate, interposing a first joint member containing an active element between said layer functioning as the insulating substrate and said intermediate layer, interposing a second joint member containing an active element between said intermediate layer and said heat sink, and joining the layers and the joint members,
wherein said second joint member directly contacts said heat sink, and the entireties of said heat sink and said second joint member are at least as wide as said insulating substrate.
12. A method of manufacturing a member for use in an electronic circuit according to claim 11 , characterized in that the layer and the joint members are joined under pressure.
13. A method of manufacturing a member for use in an electronic circuit according to claim 12 , characterized in that said pressure ranges from 0.2 MPa to 10 MPa.
14. A method of manufacturing a member for use in an electronic circuit according to claim 11 , characterized in that said layer functioning as the insulating substrate, said joint members, and said heat sink have a coefficient of thermal expansion ranging from 3.0×10 −6 to 1.0×10 −5 /K.
15. A method of manufacturing a member for use in an electronic circuit according to claim 11 , characterized in that said joint members are made of a hard brazing material containing an active element.
16. A method of manufacturing a member for use in an electronic circuit according to claim 15 , characterized in that said active element comprises at least one element belonging to the 2A group, 3A group, 4A group, 5A group, or 4B group in the periodic table.
17. A method of manufacturing a member for use in an electronic circuit according to claim 11 , characterized in that said heat sink is made of a material comprising at least one selected from the group consisting of SiC, AlN, Si 3 N 4 , BeO, Al 2 O 3 , Be 2 C, C, Cu, Cu alloy, Al, Al alloy, Ag, Ag alloy, and Si.
18. A method of manufacturing a member for use in an electronic circuit according to claim 17 , characterized in that said heat sink is made of a composite material having an SiC matrix infiltrated with Cu or Cu alloy.
19. A method of manufacturing a member for use in an electronic circuit according to claim 17 , characterized in that said heat sink is made of a composite material having a C matrix infiltrated with Cu or Cu alloy.
20. A method of manufacturing a member for use in an electronic circuit according to claim 11 , characterized in that said layer functioning as the insulating substrate comprises an AlN layer or an Si 3 N 4 layer.
21. An electronic component having an electronic circuit chip mounted on a heat sink with a thermally conductive layer and a base layer interposed therebetween, characterized in that said thermally conductive layer includes at least an intermediate layer interposed between said heat sink and a layer functioning as an insulating substrate, a first joint member containing an active element interposed between said layer functioning as the insulating substrate and said intermediate layer, and a second joint member containing an active element interposed between said intermediate layer and said heat sink,
wherein said second joint member directly contacts said heat sink, and the entireties of said heat sink and said second joint member are at least as wide as said insulating substrate.
22. An electronic component according to claim 21 , characterized in that said thermally conductive layer includes an electrode disposed on said layer functioning as the insulating substrate with a third joint member interposed therebetween which contains an active element.
23. A method of manufacturing a member for use in an electronic circuit according to claim 11 , characterized in that said heat sink, said layer functioning as an insulating substrate, and an electrode are simultaneously joined.