IP Library › Patent Application 10258559
Patent Application Utility PCT National Stage
App. No. 10/258,559 · Confirmation No. 4336

DEVICE AND METHOD FOR THE TREATMENT OF SEMICONDUCTOR WAFERS

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2006-06-05 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2003-12-12 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-12-12 OATH Oath or Declaration filed 6 View
2003-09-24 C.AD Change of Address 1 View
2002-10-23 TRNA Transmittal of New Application 2 View
2002-10-23 A.PE Preliminary Amendment 7 View
2002-10-23 SPEC Specification 20 View
2002-10-23 CLM Claims 8 View
2002-10-23 ABST Abstract 1 View
2002-10-23 DRW Drawings-only black and white line drawings 3 View
2002-10-23 OATH Oath or Declaration filed 2 View
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Quick Facts
App. No.
10/258,559
Filed
2002-10-23
Granted
2004-03-16
Pub. No.
US20030098043A1
Art Unit
1746
PTA
-2 days