Vacuum coating apparatus
View Patent ↗A system for coating band-shaped material, where the band-shaped material travels through at least one process chamber in which there is a vacuum, and at least one cooling roller. On the peripheral surface of each cooling roller are at least two magnetron sputter sources that are arranged separate from one another in magnetron chambers, which are formed by separate magnetron chamber walls and allow each chamber to be evacuated, so the pressure in the magnetron chamber can be maintained higher than that in the process chamber. The magnetron chamber walls and the magnetron sputter sources can be mounted on a common carriage, which is displaceable parallel to the cooling roller axis. The result is the reduction in the maintenance costs in cleaning of the magnetron chamber walls and at the same time improvement of the separation of gas between the magnetron chambers and the process chamber.
1. Apparatus for vacuum coating a band of material, comprising:
a process chamber;
a cooling roller for transporting said band of material within said process chamber, said cooling roller having an axis for rotation and a peripheral surface wherein said process chamber includes a first vacuum source connection;
at least two magnetron chambers arranged adjacent said peripheral surface within said process chamber, said magnetron chambers each including a magnetron sputter source and surrounding walls having flow resistance seals acting with said peripheral surface and forming a closed magnetron chamber with said peripheral surface; and
wherein each of said magnetron chambers includes a corresponding vacuum source connection separate from said first vacuum source connection such that a pressure difference between each magnetron chamber and said process chamber is adjustable, and wherein said magnetron chambers are mounted to a common carriage and arranged such that said common carriage and said magnetron chamber will be displaced in a direction parallel to said roller axis.
2. Apparatus as specified in claim 1 further comprising at least one vacuum generator operably coupled to said first vacuum source connection.
3. Apparatus as specified in claim 1 wherein said flow resistance seals are arranged to be moved away from said peripheral surface.
4. Apparatus as specified in claim 1 wherein magnetron chambers arranged on one side of said roller axis are arranged to be swung away from said peripheral surface.
5. Apparatus as specified in claim 1 wherein said carriage is arranged for displacement in a direction transverse to said roller axis to move said magnetron chambers away from said peripheral surface.
6. Apparatus as specified in claim 1 wherein said cooling roller is mounted to a frame and wherein said carriage is arranged to be adjusted in position with respect to said frame.
7. Apparatus as specified in claim 1 wherein there is provided a vacuum generator for said process chamber and at least a second vacuum generator for said magnetron chambers.
8. Apparatus as specified in claim 7 wherein said vacuum generator is arranged to provide a lower pressure in said process chamber than in said magnetron chambers.