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App. No. 10/263,679 · Confirmation No. 5682

METHOD OF MEASURING CONTACT ALIGNMENT IN A SEMICONDUCTOR DEVICE INCLUDING AN INTEGRATED CIRCUIT

Inventor: Osamu Nanba
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2003-07-16 IFEE Issue Fee Payment (PTO-85B) 1 View
2002-10-04 TRNA Transmittal of New Application 1 View
2002-10-04 A.PE Preliminary Amendment 3 View
2002-10-04 SPEC Specification 8 View
2002-10-04 CLM Claims 5 View
2002-10-04 ABST Abstract 1 View
2002-10-04 DRW Drawings-only black and white line drawings 6 View
2002-10-04 OATH Oath or Declaration filed 2 View
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Quick Facts
App. No.
10/263,679
Filed
2002-10-04
Granted
2003-09-23
Pub. No.
US20030030456A1
Art Unit
2829
PTA
0 days