Method for manufacturing polymer microstructures and polymer waveguides

1. A microfabrication process comprising:

(A) providing a precursor article comprising:

(a) a substrate;

(b) a first polymer layer overlying the substrate;

(c) a second polymer layer overlying the first polymer layer;

(d) a metal hardmask layer overlying the second polymer layer; and

(e) a photodefinable layer overlying the metal hardmask layer;

(B) exposing the photodefinable layer to radiation through a photomask having a defined pattern;

(C) developing the photodefinable layer following exposure to remove portions of the photodefinable layer defined by the pattern and uncover corresponding portions of the underlying metal hardmask layer;

(D) etching the uncovered portions of the metal hardmask layer with a first plasma to uncover corresponding portions of the underlying second polymer layer without etching through the remaining photodefinable layer;

(E) etching (i) the remaining portions of the photodefinable layer, (ii) the uncovered portions of the second polymer layer, and (iii) underlying portions of the first polymer layer corresponding to the uncovered portions of the second polymer layer with a second plasma that does not etch the remaining portions of the metal hardmask layer to uncover corresponding portions of the substrate; and

(F) removing the remaining portions of the metal hardmask layer and remaining portions of the second polymer layer to yield an article comprising the substrate and portions of the first polymer layer overlying the substrate arranged in a pattern that corresponds to the pattern of the photomask.

2. The process of claim 1 , wherein the substrate has a refractive index that is lower than the refractive index of the first polymer layer.

3. The process of claim 2 , wherein the substrate is selected from the group consisting of an organic polymer, a crosslinkable organic polymer, a sol-gel, and an organically modified sol-gel.

4. The process of claim 1 , wherein the metal hardmask layer comprises titanium.

5. The process of claim 1 , wherein the first polymer layer comprises an electro-optically active polymer.

6. The process of claim 5 , wherein the electro-optically active polymer is crosslinkable.

7. The process of claim 1 , wherein the photodefinable layer comprises a novolak resin.

8. The process of claim 1 , wherein the photodefinable layer comprises a positive tone photoresist.

9. The process of claim 1 , wherein the photodefinable layer comprises a negative tone photoresist.

10. The process of claim 1 , wherein the metal hardmask layer has a thickness no greater than about 0.035 μm.

11. The process of claim 1 , wherein the second polymer layer has a thickness no greater than about 1.5 μm.

12. The process of claim 1 , wherein the photodefinable layer has a thickness no greater than about 1.5 μm.

13. The process of claim 1 , wherein the pattern of the photomask defines a Mach-Zehnder modulator or directional coupler.

14. The process of claim 1 , wherein the first plasma comprises sulfur hexafluoride.

15. The process of claim 1 , wherein the second plasma comprises oxygen.

16. The process of claim 1 , wherein:

the substrate comprises an organically modified sol-gel;

the first polymer layer comprises an electro-optically active, crosslinkable polymer, and has a

refractive index that is higher than the refractive index of the substrate;

the second polymer layer comprises a novolak resin;

the metal hardmask layer comprises titanium;

the photodefinable layer comprises a novolak resin;

the pattern of the photomask defines a Mach-Zehnder modulator or directional coupler;

the first plasma comprises sulfur hexafluoride; and

the second plasma comprises oxygen.

17. A microfabrication process for preparing a polymer optical waveguide comprising:

(A) providing an optical waveguide precursor comprising:

(a) a polymer substrate having a refractive index;

(b) an electro-optically active polymer layer overlying the substrate having a refractive index that is higher than the refractive index of the substrate;

(c) a second polymer layer overlying the electro-optically active polymer layer;

(d) a metal hardmask layer having a thickness no greater than about 0.035 μm overlying the second polymer layer; and

(e) a photodefinable layer overlying the metal hardmask layer;

(B) exposing the photodefinable layer to radiation through a photomask having a defined pattern;

(C) developing the photodefinable layer following exposure to remove portions of the photodefinable layer defined by the pattern and uncover corresponding portions of the underlying metal hardmask layer;

(D) etching the uncovered portions of the metal hardmask layer with a first plasma to uncover corresponding portions of the underlying second polymer layer without etching through the remaining photodefinable layer;

(E) etching (i) the remaining portions of the photodefinable layer, (ii) the uncovered portions of the second polymer layer, and (iii) underlying portions of the electro-optically active polymer layer corresponding to the uncovered portions of the second polymer layer with a second plasma that does not etch the remaining portions of the metal hardmask layer to uncover corresponding portions of the polymer substrate; and

(F) removing the remaining portions of the metal hardmask layer and remaining portions of the second polymer layer to yield a polymer optical waveguide comprising the polymer substrate and portions of the electro-optically active polymer layer overlying the substrate arranged in a pattern that corresponds to the pattern of the photomask.

18. An optical waveguide precursor comprising:

(a) a polymer substrate having a refractive index;

(b) an electro-optically active polymer layer overlying the substrate having a refractive index that is higher than the refractive index of the substrate;

(c) a second polymer layer overlying the electro-optically active polymer layer;

(d) a metal hardmask layer having a thickness no greater than about 0.035 μm overlying the second polymer layer; and

(e) a photodefinable layer overlying the metal hardmask.