IP Library › Granted Patent US 6,660,639
Granted Patent Utility
US 6,660,639 · Confirmation No. 8791

METHOD OF FABRICATING A COPPER DAMASCENE STRUCTURE

Inventors: Yuzhuo Li, Jason Keleher
Patented Case View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2003-10-15 IFEE Issue Fee Payment (PTO-85B) 1 View
2002-10-07 TRNA Transmittal of New Application 1 View
2002-10-07 ADS Application Data Sheet 4 View
2002-10-07 A.PE Preliminary Amendment 10 View
2002-10-07 SPEC Specification 13 View
2002-10-07 CLM Claims 5 View
2002-10-07 ABST Abstract 1 View
2002-10-07 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,660,639
App. No.
10/266,169
Filed
2002-10-07
Granted
2003-12-09
Pub. No.
US20030098434A1
Art Unit
1765
PTA
0 days