IP Library › Patent Application 10271176
Patent Application Utility
App. No. 10/271,176 · Confirmation No. 2739

SEMICONDUCTOR FABRICATING METHOD EMPLOYING PARALLEL PROCESSING AND INSPECTION TECHNIQUES

Inventor: Toshiyuki Makita
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2004-05-28 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-05-28 LET. Miscellaneous Incoming Letter 3 View
2004-05-28 DRW Drawings-only black and white line drawings 1 View
2004-02-25 NOA Notice of Allowance and Fees Due (PTOL-85) 6 View
2004-02-25 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-02-25 SRFW Search information including classification, databases and other search related notes 1 View
2004-02-19 SRNT Examiner's search strategy and results 1 View
2004-01-26 A.NE Response After Final Action 2 View
2004-01-26 CLM Claims 3 View
2004-01-26 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2003-10-21 CTFR Final Rejection 7 View
2003-10-08 SRNT Examiner's search strategy and results 1 View
2003-09-22 LET. Miscellaneous Incoming Letter 4 View
2003-09-22 DRW Drawings-only black and white line drawings 1 View
2003-09-22 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-09-22 CLM Claims 4 View
2003-09-22 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2003-07-18 CTNF Non-Final Rejection 6 View
2003-07-18 892 List of references cited by examiner 1 View
2003-07-18 FOR Foreign Reference 10 View
2003-07-12 SRNT Examiner's search strategy and results 1 View
2003-02-07 C.AD Change of Address 1 View
2002-10-15 TRNA Transmittal of New Application 4 View
2002-10-15 SPEC Specification 30 View
2002-10-15 CLM Claims 3 View
2002-10-15 ABST Abstract 1 View
2002-10-15 DRW Drawings-only black and white line drawings 9 View
2002-10-15 OATH Oath or Declaration filed 2 View
2002-10-15 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-10-15 SRFW Search information including classification, databases and other search related notes 1 View
2002-10-15 FWCLM Index of Claims 1 View
2002-10-15 TRNA Transmittal of New Application 4 View
2002-10-15 DRW Drawings-only black and white line drawings 9 View
2002-10-15 SPEC Specification 30 View
2002-10-15 CLM Claims 3 View
2002-10-15 ABST Abstract 1 View
2002-10-15 OATH Oath or Declaration filed 2 View
2002-10-15 WFEE Fee Worksheet (SB06) 1 View
2002-10-15 WFEE Fee Worksheet (SB06) 2 View
2002-10-15 FRPR Certified Copy of Foreign Priority Application 38 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
10/271,176
Filed
2002-10-15
Granted
2004-07-06
Pub. No.
US20030077151A1
Art Unit
2813
PTA
-8 days