Granted Patent B2

US 7,506,593 · App. 10/278,748 · Granted Mar 24, 2009

Abstract

Claims (36)

1. A pedestal for a microfabrication tool, comprising;

a frame constructed and arranged to support at least a weight of the microfabrication tool; and

at least three supports constructed and arranged to support the frame from below the frame, each support connected to the frame at a respective connection point, wherein at least two of the at least three supports are movable horizontally along the frame and relative to the frame within a perimeter defined by the frame independently of the respective connection point of each of the other supports of the at least three supports.

2. The pedestal of claim 1 , wherein the frame lies substantially in a plane defined by orthogonal axes, wherein the at least three supports are arranged substantially perpendicular to the plane, and wherein at least one of the at least three supports is movable along the frame and relative to the frame along at least one of the orthogonal axes.

3. The pedestal of claim 1 , wherein the at least two of the at least three supports are slidably connected to the frame.

4. The pedestal of claim 3 , wherein the frame comprises a rail and wherein the at least two of the at least three supports are arranged to slidably connect with the rail.

5. The pedestal of claim 3 , wherein the frame comprises a channel and wherein the at least two of the at least three supports are arranged to slidably connect with the channel.

6. The pedestal of claim 1 , wherein at least one of at least three supports is adjustable in length.

7. The pedestal of claim 6 , wherein the at least one of the at least three supports comprises a threaded member positioned substantially along a vertical axis of the at least one support that is constructed and arranged to allow adjustment of a length of the at least one of the at least three supports.

8. The pedestal of claim 1 , wherein the pedestal comprises means for dampening vibration.

9. The pedestal of claim 1 , wherein the pedestal comprises a vibration dampener.

10. The pedestal of claim 9 , wherein the vibration dampener comprises a resilient polymeric material.

11. The pedestal of claim 9 , wherein the vibration dampener is positioned on the inside of at least a portion of the pedestal.

12. The pedestal of claim 1 , further comprising an adjustable length brace connected to a first and a second of the plurality of supports.

13. The pedestal of claim 1 , further comprising a connection facilitator connected to the frame.

14. The pedestal of claim 1 , further comprising an upper surface constructed and arranged to support the microfabrication tool and connected to the frame.

15. The pedestal of claim 1 , wherein the microfabrication tool is a semiconductor process tool.

16. The pedestal of claim 1 , wherein the microfabrication tool is a microelectrical machine process tool.

17. The pedestal of claim 1 , wherein the frame is constructed and arranged to be expandable.

18. The pedestal of claim 17 , wherein the frame comprises a telescoping element constructed and arranged to allow expansion of the frame.

19. The pedestal of claim 17 , wherein the frame comprises a threaded element constructed and arranged to allow expansion of the frame.

20. The pedestal of claim 1 , further comprising at least one additional support connected to the frame.

21. The pedestal of claim 1 , wherein the weight of the microfabrication tool is about 7,000 pounds.

22. The pedestal of claim 1 , wherein the frame is constructed and arranged to support at least a weight of the microfabrication tool on an upper surface of the frame.

23. A pedestal to support a microfabrication tool, the pedestal comprising:

a frame constructed and arranged to support at least a weight of the microfabrication tool;

at least three supports attached to the frame at a connection point below the frame; and

means for laterally adjusting a position of at least two of the at least three supports horizontally along the frame and relative to the frame within a perimeter defined by the frame independently of the position of each of the other supports of at least three supports.

24. The pedestal of claim 23 , wherein the frame is constructed and arranged to support at least a weight of the microfabrication tool on an upper surface of the frame.

25. A method of providing a support for a microfabrication tool, comprising:

providing a pedestal comprising a frame constructed and arranged to support at least a weight of the microfabrication tool and at least three supports each connected to the frame at a respective position below the frame; and

laterally repositioning at least one of the at least three supports horizontally along the frame and relative to the frame within a perimeter defined by the frame independently of the respective position of each of the other of the at least three supports.

26. The method of claim 25 , further comprising adjusting the length of the supports to provide a desired height of the frame.

27. The method of claim 25 , wherein laterally repositioning at least one of the at least three supports comprises repositioning the at least one of the at least three supports to align with a selected location on a mounting floor.

28. The method of claim 25 , further comprising positioning a microfabrication tool on the pedestal.

29. The method of claim 25 , wherein providing a pedestal comprises providing a pedestal comprising a frame constructed and arranged to support at least a weight of the microfabrication tool on an upper surface of the frame.

Assignments (8)