IP Library Granted Patent US 7,122,105
Granted Patent B1
US 7,122,105 · App. 10/278,779 · Granted Oct 17, 2006

Use of siderophores to increase the current efficiency of iron plating solutions

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Quick Facts
Patent No.
US 7,122,105
App. No.
10/278,779
Granted
Oct 17, 2006
Kind
B1
Abstract

A method of electroplating iron or an iron alloy with a solution containing an iron-chelating agent to catalytically cycle the undesirable Fe(III) species back to Fe(II) for electroplating. The iron-chelating agents may be siderophores, specifically, for example, desferrioxamine E, desferrioxamine B, alcaligin, bisucaberin, putrebactin, rhodotorulic acid, enterobactin, vibriobactin, azotochelin, myxochelin, fluvibactin, and serratiochelin.

Claims (34)

1. A method of decreasing the iron(III) species concentration in an iron metal or iron alloy electroplating solution comprising:

adding a siderophore to the electroplating solution;

contacting the siderophore with an iron(III) species to form a first iron(III)-siderophore complex;

electrochemically reducing the first iron(III)-siderophore complex to produce a first iron(II)-siderophore complex; and

contacting the first iron(II)-siderophore complex with an iron(III) species to form a second iron(III)-siderophore complex and an iron(II) species.

2. The method according to claim 1 , wherein the siderophore is present in a catalytically effective amount.

3. The method according to claim 2 , wherein the catalytically effective amount of the siderophore is less than about 10 −3 M.

4. The method according to claim 3 , wherein the catalytically effective amount of the siderophore is between about 10 −4 M to about 10 −5 M.

5. The method according to claim 1 , wherein the siderophore comprises at least one functional group selected from hydroxamate and catecholate.

6. The method according to claim 5 , wherein the hydroxamate is selected from the group consisting of a linear trihydroxamic acid, a linear dihydroxamic acid, a cyclic trihydroxamic acid, a cyclic dihydroxamic acid and a monohydroxamic acid.

7. The method according to claim 1 , wherein the siderophore is selected from the group consisting of desferrioxamine E, desferrioxamine B, alcaligin, bisucaberin, putrebactin, rhodotorulic acid, enterobactin, vibriobactin, azotochelin, myxochelin, fluvibactin, serratiochelin and mixtures thereof.

8. The method according to claim 7 , wherein the siderophore is desferrioxamine B.

9. The method according to claim 1 , wherein the electroplating solution is at a pH of less than about 5.

10. The method according to claim 9 , wherein the electroplating solution is at a pH of less than about 3.5.

11. The method according to claim 10 , wherein the electroplating solution is at a pH of less than about 3.1.

12. The method according to claim 1 , wherein the electroplating solution further comprises at least one of the group consisting of a stress reducing agent, a complexing agent, a supporting electrolyte, a brightener and a buffer.

13. The method according to claim 1 , further comprising:

electrochemically reducing the second iron(III)-siderophore complex to produce a second iron(II)-siderophore complex; and

contacting the second iron(II)-siderophore complex with an iron(III) species to form a third iron(III)-siderophore complex and an iron(II) species.

14. A method of electroplating iron metal or an iron alloy onto a substrate in an electroplating cell comprising:

contacting a substrate with an electroplating solution, wherein the electroplating solution comprises

iron present as iron(II) species and iron(III) species, and

a siderophore;

applying a voltage across an anode and a cathode in contact with the electroplating solution in the electroplating cell; and

depositing the resulting iron metal or the iron alloy onto the substrate, wherein the siderophore comprises at least one functional group selected from hydroxamate and catecholate and forms an iron(III) siderophore complex with a higher stability constant than a corresponding iron(II) siderophore complex.

15. The method according to claim 14 , wherein the hydroxamate is selected from the group consisting of a linear trihydroxamic acid, a linear dihydroxamic acid, a cyclic trihydroxamic acid, a cyclic dihydroxamic acid and a monohydroxamic acid.

16. The method according to claim 14 , wherein the siderophore is selected from the group consisting of desferrioxamine E, desferrioxamine B, alcaligin, bisucaberin, putrebactin, rhodotorulic acid, enterobactin, vibriobactin, azotochelin, myxochelin, fluvibactin, serratiochelin and mixtures thereof.

17. The method according to claim 16 , wherein the siderophore is desferrioxamine B.

18. The method according to claim 14 , further comprising:

electrochemically reducing the iron(III)-siderophore complex to produce an iron(II)-siderophore complex; and

contacting the iron(II)-siderophore complex with an iron(III) species to form a second iron(III)-siderophore complex and an iron(II) species.

19. The method according to claim 18 , further comprising:

electrochemically reducing the second iron(III)-siderophore complex to produce a second iron(II)-siderophore complex; and

contacting the second iron(II)-siderophore complex with an iron(III) species to form a third iron(III)-siderophore complex and an iron(II) species.

Assignments (5)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 11, 2022
From: ALTERA CORPORATION
To: INTEL CORPORATION
Reel/Frame 061159/0694 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 20, 2022
From: ENPIRION, INC.
To: ALTERA CORPORATION
Reel/Frame 060390/0187 →
RELEASE OF SECURITY INTEREST Recorded Feb 20, 2009
From: HERCULES TECHNOLOGY II, L.P.
To: ENPIRION, INC.
Reel/Frame 022277/0935 →
SECURITY AGREEMENT Recorded May 27, 2008
From: ENPIRION, INC.
To: HERCULES TECHNOLOGY II, L.P.
Reel/Frame 021029/0674 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 20, 2003
From: FILAS, ROBERT W.
To: ENPIRION, INC.
Reel/Frame 013865/0509 →