IP Library Granted Patent US 7,144,489
Granted Patent B1
US 7,144,489 · App. 10/278,784 · Granted Dec 5, 2006

Photochemical reduction of Fe(III) for electroless or electrodeposition of iron alloys

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Quick Facts
Patent No.
US 7,144,489
App. No.
10/278,784
Granted
Dec 5, 2006
Kind
B1
Abstract

A method of photochemically reducing iron(III) species in an iron or iron alloy plating solution by adding an additive to the electroplating solution; contacting the additive with iron(III) species to form an iron(III)-additive species; and irradiating the electroplating solution, wherein the radiation is of sufficient energy to reduce the iron(III) in the iron(III)-additive species to iron(II). The additive comprises hydroxycarboxylic acids and their lactones.

Claims (30)

1. A method of photochemically reducing iron(III) species in an iron or iron alloy electroplating solution comprising:

adding an additive to the electroplating solution;

contacting the additive with an iron(III) species to form an iron(III)-additive species; and

irradiating the electroplating solution, wherein the radiation is of sufficient energy to reduce the iron(III) in the iron(III)-additive species to iron(II),

wherein the additive is saccharic acid or a salt or lactone thereof.

2. The method according to claim 1 , wherein irradiating the electroplating solution oxidizes the additive.

3. The method according to claim 2 , further comprising adding the additive to the electroplating solution to replace the oxidized additive.

4. The method according to claim 1 , wherein the additive is air stable.

5. The method according to claim 1 , wherein the pH of the electroplating solution is less than about 7.

6. The method according to claim 5 , wherein the pH of the electroplating solution is less than about 5.

7. The method according to claim 6 , wherein the pH of the electroplating solution is less than about 3.5.

8. The method according to claim 7 , wherein the pH of the electroplating solution is less than about 3.1.

9. The method according to claim 1 , wherein the salt is a monopotassium salt of saccharic acid.

10. A method of electroplating iron or an iron alloy onto a substrate in an electroplating cell comprising:

contacting a substrate with an electroplating solution, wherein the electroplating solution comprises:

iron present as iron(II) and iron(III) species, and

an additive to substantially limit the concentration of the iron(III) species in the electroplating solution, wherein the additive is saccharic acid or a salt or lactone thereof;

applying a voltage across an anode and a cathode in contact with the electroplating solution in an electroplating cell;

irradiating the electroplating solution; and

depositing the iron or iron alloy onto the substrate.

11. The method according to claim 10 , wherein the concentration of the iron(III) species is substantially limited by its contact with the additive to form an iron(III)-additive species.

12. The method according to claim 11 , wherein the irradiating comprises exposing the electroplating solution to radiation of sufficient energy to reduce the iron(III) present in the iron(III)-additive species to iron(II).

13. The method according to claim 12 , wherein the irradiating oxidizes the additive.

14. The method according to claim 13 , further comprising a step of adding the additive to the electroplating solution to replace the oxidized additive.

15. The method according to claim 10 , wherein the additive is air stable.

16. The method according to claim 10 , wherein the pH of the electroplating solution is less than about 7.

17. The method according to claim 16 , wherein the pH of the electroplating solution is less than about 5.

18. The method according to claim 17 , wherein the pH of the electroplating solution is less than about 3.5.

19. The method according to claim 18 , wherein the pH of the electroplating solution is less than about 3.1.

20. The method according to claim 10 , wherein the salt is a monopotassium salt of saccharic acid.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 11, 2022
From: ALTERA CORPORATION
To: INTEL CORPORATION
Reel/Frame 061159/0694 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 20, 2022
From: ENPIRION, INC.
To: ALTERA CORPORATION
Reel/Frame 060390/0187 →