IP Library Granted Patent US 7,004,558
Granted Patent B2
US 7,004,558 · App. 10/280,414 · Granted Feb 28, 2006

Fluid ejection device including integrated circuit with shielding element

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Quick Facts
Patent No.
US 7,004,558
App. No.
10/280,414
Granted
Feb 28, 2006
Kind
B2
Abstract

Integrated circuits and methods for producing them are provided. In particular, integrated circuits with shielding elements are provided.

Claims (34)

1. A fluid ejection device, comprising:

one or more firing mechanisms for ejecting a fluid;

an integrated circuit including a shielding element where the integrated circuit includes logic to control the one or more firing mechanisms;

where the shielding element electrically isolates a sensitive section of the integrated circuit to prevent damaging side effects of a manufacturing process; and

a semiconducting die, the semiconducting die having a drill slot disposed through the semiconducting die for allowing flow of ink to the one or more firing mechanisms, wherein the sensitive section comprising a region within a doped layer of the semiconducting die surrounding the drill slot.

2. A fluid ejection device comprising an integrated circuit including a shielding element, wherein the integrated circuit is a multilayer integrated circuit comprising a drill slot through at least one doped Silicon layer, wherein the one doped Silicon layer is at least substantially divided by the shielding clement into a first section enclosing the drill slot and a second section.

3. The fluid ejection device of claim 1 , wherein the shielding element comprises a dielectric layer disposed above a low conductance semiconductor region.

4. The fluid ejection device of claim 3 , wherein the dielectric layer comprises gate oxide.

5. The fluid ejection device of claim 4 , wherein the shielding element further comprises a gate electrode layer disposed above the gate oxide layer.

6. The fluid ejection device of claim 2 wherein:

the shielding element including a gate oxide layer; the integrated circuit further including:

a gate electrode layer disposed above the gate oxide layer; and

a charge dissipating element connecting the gate electrode layer to ground.

7. The fluid ejection device of claim 6 , wherein the shielding element electrically separates a first doped Silicon region from a second doped Silicon region.

8. The fluid ejection device of claim 7 , wherein the first doped Silicon region is formed by being exposed to a Silicon etch treatment.

9. The fluid ejection device of claim 8 , wherein the Silicon etch is used to pre-define the drill slot.

10. The fluid ejection device of claim 2 , wherein the shielding element comprises a gate oxide layer disposed above a low conductance Silicon layer.

11. A print head comprising:

a multi-layer integrated circuit, further comprising means for electrically isolating a sensitive section of a said circuit to prevent damaging side effects of a manufacturing process; and

a semiconducting die, a drill slot disposed throughout the die allowing the flow of ink, wherein said sensitive section comprising a region within a doped layer of the semiconducting die surrounding the drill slot.

12. An ink jet print cartridge, comprising:

a print head, further comprising a multilayer integrated circuit comprising a shielding element and a drill slot through at least one doped semiconductor layer;

wherein the one doped semiconductor layer is at least substantially divided by the shielding element into a first section enclosing the drill slot and a second section.

13. A slot fed print head useful for ink jet printers, comprising:

a multi-layer integrated circuit, the circuit further comprising at least a Silicon die and a cavitation layer;

a drill slot disposed through the Silicon die;

a doped Silicon region surrounding the drill slot at the surface of the Silicon die;

a gate oxide enclosure substantially enclosing the doped Silicon region surrounding the drill slot and disposed directly above low conductance Silicon die; and

a Polycrystalline Silicon layer disposed directly above the gate oxide enclosure, the Polycrystalline Silicon layer comprising a dissipating element connecting the Polycrystalline Silicon layer to ground.

14. A print head comprising:

one or more firing mechanisms for ejecting a fluid;

a multi-layer integrated circuit, further comprising means for electrically isolating a sensitive section of a said circuit to prevent damaging side effects of a manufacturing process;

where the multi-layer integrated circuit being configured to control the one or more firing mechanisms for ejecting the fluid; and

a semiconducting die, a drill slot disposed throughout the die allowing the flow of ink, wherein said sensitive section comprising a region within a doped layer of the semiconducting die surrounding the drill slot.