Method of forming ohmic electrode
View Patent ↗There is provided a method of forming an ohmic electrode, including the steps of: forming a hafnium layer on a surface of an n type nitride-based compound semiconductor layer to have a thickness of 1 to 15 nm; forming an aluminum layer on the hafnium layer; and annealing the hafnium layer and the aluminum layer to form a layer formed of hafnium and aluminum mixed together.
1. A method of forming an ohmic electrode, the method comprising:
forming a hafnium layer on a surface of an n type nitride-based compound semiconductor layer to have a thickness of 1 to 15 nm;
forming an aluminum layer on the hafnium layer and; and
annealing the hafnium layer and the aluminum layer to form a layer formed of hafnium and aluminum mixed together, so that after said annealing the layer formed comprising hafnium and aluminum mixed together has an Hf content from 0.001 to 50% in a vicinity of an interface between the nitride-based compound semiconductor layer and the layer formed comprising hafnium and aluminum mixed together.
2. The method of claim 1 , wherein the ohmic electrode is an electrode of a light emitting diode.
3. The method of claim 1 , wherein the ohmic electrode is an electrode of a light emitting nitride-based compound semiconductor device.