Granted Patent
Utility
US 6,823,589
· Confirmation No. 7871
FLEXIBLY SUSPENDED GAS DISTRIBUTION MANIFOLD FOR PLASMA CHAMBER
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-07-27 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 2 | View | |
| 2004-07-27 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2004-06-29 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 6 | View | |
| 2004-06-14 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2004-04-19 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2004-03-25 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-03-25 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 1 | View | |
| 2004-03-25 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-03-25 | FWCLM |
Index of Claims | 1 | View | |
| 2004-03-25 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-02-24 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2004-02-24 | SPEC |
Specification | 2 | View | |
| 2004-02-24 | CLM |
Claims | 5 | View | |
| 2004-02-24 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2004-02-24 | DRW |
Drawings-only black and white line drawings | 1 | View | |
| 2003-12-10 | EXIN |
Examiner Interview Summary Record (PTOL - 413) | 4 | View | |
| 2003-11-19 | CTNF |
Non-Final Rejection | 5 | View | |
| 2003-11-19 | 892 |
List of references cited by examiner | 2 | View | |
| 2003-11-19 | FOR |
Foreign Reference | 6 | View | |
| 2003-11-19 | FOR |
Foreign Reference | 4 | View | |
| 2003-11-19 | FOR |
Foreign Reference | 83 | View | |
| 2003-11-19 | FOR |
Foreign Reference | 40 | View | |
| 2003-11-19 | FOR |
Foreign Reference | 58 | View | |
| 2003-10-28 | SRNT |
Examiner's search strategy and results | 49 | View | |
| 2003-10-06 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2003-10-06 | CLM |
Claims | 6 | View | |
| 2003-10-06 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2003-10-06 | CLM |
Claims | 9 | View | |
| 2003-08-28 | CTRS |
Requirement for Restriction/Election | 4 | View | |
| 2003-07-10 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2003-07-10 | SPEC |
Specification | 1 | View | |
| 2003-07-10 | CLM |
Claims | 7 | View | |
| 2003-07-10 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2002-11-12 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-11-12 | A.PE |
Preliminary Amendment | 7 | View | |
| 2002-11-12 | SPEC |
Specification | 16 | View | |
| 2002-11-12 | CLM |
Claims | 10 | View | |
| 2002-11-12 | ABST |
Abstract | 1 | View | |
| 2002-11-12 | DRW |
Drawings-only black and white line drawings | 12 | View | |
| 2002-11-12 | OATH |
Oath or Declaration filed | 3 | View | |
| 2002-11-12 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2002-11-12 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2002-11-12 | FWCLM |
Index of Claims | 1 | View | |
| 2002-11-12 | DRW |
Drawings-only black and white line drawings | 12 | View | |
| 2002-11-12 | SPEC |
Specification | 16 | View | |
| 2002-11-12 | CLM |
Claims | 10 | View | |
| 2002-11-12 | ABST |
Abstract | 1 | View | |
| 2002-11-12 | OATH |
Oath or Declaration filed | 3 | View | |
| 2002-11-12 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-11-12 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-11-12 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View | |
| 2002-11-12 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2002-11-12 | CLM |
Claims | 6 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
29/890.14
C23C16/45565
H01J37/3244
Y10T29/49428
Y10T29/49826
C23C16/455
C23C16/5096
Prosecution
- Examiner
- ROSENBAUM, IRENE CUDA
- Art Unit
- 3726
- Docket No.
- AM 3101.D1
- Confirmation No.
- 7871
Publication
- Pub. No.
- US20030066607A1
- Pub. Date
- 2003-04-10
Patent Term Adjustment
-34days
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Quick Facts
- Patent No.
- US 6,823,589
- App. No.
- 10/293,544
- Filed
- 2002-11-12
- Granted
- 2004-11-30
- Pub. No.
- US20030066607A1
- Examiner
- ROSENBAUM, IRENE CUDA
- Art Unit
- 3726
- PTA
- -34 days
External Links