IP Library › Granted Patent US 6,821,343
Granted Patent Utility
US 6,821,343 · Confirmation No. 8154

SEMICONDUCTOR DEVICE, MANUFACTURING METHOD THEREFOR, AND SEMICONDUCTOR MANUFACTURING APPARATUS

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2014-07-17 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2014-07-17 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2014-06-27 TRAN.LET Transmittal Letter 1 View
2014-06-27 R3.73 Assignee showing of ownership per 37 CFR 3.73 1 View
2014-06-27 PA.. Power of Attorney 2 View
2014-06-27 N417 Electronic Filing System Acknowledgment Receipt 2 View
2004-07-09 IFEE Issue Fee Payment (PTO-85B) 2 View
2004-04-08 FWCLM Index of Claims 1 View
2004-04-08 SRFW Search information including classification, databases and other search related notes 1 View
2004-04-08 NOA Notice of Allowance and Fees Due (PTOL-85) 6 View
2004-04-08 1449 List of References cited by applicant and considered by examiner 3 View
2004-02-09 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2004-01-09 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-01-09 SPEC Specification 1 View
2004-01-09 CLM Claims 4 View
2004-01-09 ABST Abstract 1 View
2004-01-09 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2004-01-09 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2004-01-09 LET. Miscellaneous Incoming Letter 1 View
2003-10-06 CTNF Non-Final Rejection 6 View
2003-10-06 892 List of references cited by examiner 1 View
2003-10-06 1449 List of References cited by applicant and considered by examiner 1 View
2003-02-27 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2003-02-27 FOR Foreign Reference 1 View
2003-02-27 FOR Foreign Reference 1 View
2002-11-13 TRNA Transmittal of New Application 5 View
2002-11-13 A.PE Preliminary Amendment 6 View
2002-11-13 SPEC Specification 58 View
2002-11-13 CLM Claims 13 View
2002-11-13 ABST Abstract 1 View
2002-11-13 DRW Drawings-only black and white line drawings 34 View
2002-11-13 OATH Oath or Declaration filed 4 View
2002-11-13 LET. Miscellaneous Incoming Letter 1 View
2002-11-13 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-11-13 SRFW Search information including classification, databases and other search related notes 1 View
2002-11-13 FWCLM Index of Claims 1 View
2002-11-13 A.PE Preliminary Amendment 11 View
2002-11-13 DRW Drawings-only black and white line drawings 34 View
2002-11-13 SPEC Specification 58 View
2002-11-13 CLM Claims 13 View
2002-11-13 ABST Abstract 1 View
2002-11-13 OATH Oath or Declaration filed 4 View
2002-11-13 WFEE Fee Worksheet (SB06) 1 View
2002-11-13 WFEE Fee Worksheet (SB06) 1 View
2002-11-13 WCLM Claims Worksheet (PTO-2022) 1 View
2002-11-13 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
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Quick Facts
Patent No.
US 6,821,343
App. No.
10/293,753
Filed
2002-11-13
Granted
2004-11-23
Pub. No.
US20030094585A1
Art Unit
2825
PTA
-35 days